I-vacuum plating ekukhethweni kwezinto ezihlosiwe ze-sputtering kube yinkinga kubantu, okwamanje, njengoba ukugqoka okuxubha, ikakhulukazi ukuthuthukiswa kwamakhono okugcoba ama-magnetron sputtering, kungashiwo nganoma yiluphi ulwazi ukuze lukwazi ukukhomba ukulungiswa kwezinto zamafilimu amancane. ngokuqhunyiswa kwamabhomu e-ion, ngoba ngokufafaza okuhlosiwe ngesikhathi sokumboza kuya ohlotsheni lwe-substrate, kunomphumela obalulekile kwikhwalithi yokufafaza. ifilimu, Ngakho-ke, izidingo zezinto eziqondiwe ziqinile kakhulu. Lapha sizofunda ngendima ye-sputtering target ekufakweni kwe-vacuum kanye nomhleli we-Beijing Relaxation
一、Isimiso sokukhetha nokuhlukaniswa kwezinto eziqondiwe
Ekukhethweni kwezinto ezihlosiwe, ngaphezu kokusetshenziswa kwefilimu ngokwayo kufanele kukhethwe, izinkinga ezilandelayo kufanele futhi zicatshangelwe:
Inkinga 1. Ngokusho kwezidingo zokusetshenziswa nokusebenza kwe-membrane, kuyadingeka ukuthi izinto ezihlosiwe zihlangabezane nezidingo zobuchwepheshe zokuhlanzeka, okuqukethwe komagazini, ukufana kwengxenye, ukunemba komshini nokunye.
Inkinga 2. Impahla eqondiwe kufanele ibe namandla amahle emishini kanye nokuzinza kwamakhemikhali ngemva kokwakhiwa kwefilimu;
Inkinga 3. Kuyadingeka ukuthi ifilimu ikhiqize ifilimu eyingxube kalula ngegesi esabelayo njengefilimu yokufafaza;
Inkinga 4. Kudingekile ukusetha okuhlosiwe kanye ne-matrix ukuze ibe namandla, ngaphandle kwalokho, impahla yefilimu ene-adhesion enhle ne-matrix kufanele yamukelwe, kuqala i-sputter ungqimba wefilimu engezansi bese ulungiselela ungqimba lwefilimu oludingekayo;
Umbuzo 5. Ngokwesisekelo sokuhlangabezana nezidingo zokusebenza kwefilimu, umehluko omncane phakathi kwe-thermal coefficient yokwandisa okuhlosiwe kanye ne-matrix, ngcono, ukuze kuncishiswe ithonya lokucindezeleka okushisayo kwefilimu e-sputtering;
Ukulungiswa kokuhlosiwe okuningana okuvame ukusetshenziswa
(1) cr target
I-Chromium njenge-sputtering film material akulula nje ukuyihlanganisa ne-base material inokunamathela okuphezulu, futhi ifilimu ye-chromium ne-oxide CrQ3, izakhiwo zayo zemishini, ukumelana ne-asidi nokuzinza kokushisa kungcono.
I-Beijing Ruichi High-tech Co., Ltd. ibambe iqhaza kakhulu kulokhu: ithagethi ye-titanium zirconium, ithagethi ye-aluminium, ithagethi ye-nickel, ithagethi ye-chromium, ithagethi ye-tungsten, ithagethi ye-molybdenum, ithagethi yethusi, ithagethi ye-silicon, ithagethi ye-niobium, ithagethi ye-tantalum, i-titanium-silicon alloy ithagethi, i-titanium-niobium alloy target, i-titanium-tungsten alloy target, Ithagethi yengxubevange ye-titanium-zirconium, ithagethi yengxubevange ye-nickel-chromium, ithagethi yengxubevange ye-silica-aluminium, ithagethi ye-nickel-vanadium alloy, i-chromium-aluminium-silicon ternary alloy target，Ti al si ternary alloy target material, esetshenziswa kakhulu ekuhlobiseni/ indawo eqinile kanye nokusebenza i-coating, ingilazi yezakhiwo, isibonisi esiyisicaba/i-optical photoelectric, indawo yokugcina izinto ezibonakalayo, izinto zikagesi, ukuphrinta neminye imisebenzi.
Isikhathi sokuthumela: Jun-02-2022