Yiziphi izimboni ezisetshenziswayo ze-titanium alloy target materials

I-sputtering titanium alloy target kanye nensimbi ye-titanium yakhiwe nge-titanium, ngakho-ke ulwazi lucishe lufane, kodwa umehluko phakathi kwakho kokubili ikakhulukazi usekuhlosweni kwe-sputtering titanium alloy wenziwe ngensimbi ye-titanium ngezindlela ezimbalwa, futhi i-titanium yenzeka ngokwemvelo I-titanium ore.Izinhloso ze-Titanium alloy zingasetshenziswa kabanzi ezigabeni eziningi zomsebenzi,Manje umbhali we-Beijing richmat sifinyeze ithagethi ye-titanium alloy evamile mayelana nokusetshenziswa kwesimo ukuze sinikeze isingeniso esiningiliziwe.
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一、Ti okuqondiwe kumasekethe ahlanganisiwe
Izidingo ze-sputtering titanium alloy target zihlukile phakathi kwamasekhethi angahlanganisiwe namasekhethi ahlanganisiwe. Ngokuvamile, amasekethe ahlanganisiwe anezidingo eziphakeme zedatha yokumboza, njengokuhlanzeka okuphezulu, usayizi wokusanhlamvu omncane kanye nokunemba kwesikali esinembe kakhudlwana.Ukuhlanzeka kokuhlosiwe kwe-titanium kumasekethe ahlanganisiwe kukhulu kuno-99.995%, okungaphezulu kwalokho okusetshenziswe kokungahlanganisiwe. amasekethe, okubonisa ukuthi ukusetshenziswa okuhlukile kwezidingo ezihlosiwe ze-titanium kuhluke kakhulu.
二、Ti ithagethi yesibonisi sephaneli eyisicaba
Izinhloso ze-Titanium alloy ezisetshenziswa ekuboniseni iphaneli eliyisicaba zihlanganisa isibonisi sekristalu ewuketshezi, isibonisi se-plasma, isibonisi se-electroluminescence nesibonisi se-field emission. izibonisi.Ukuhlanzeka kwethagethi ye-titanium alloy yezibonisi zamaphaneli ayisicaba kuvame ukuba kukhulu kuno-99.9%.
三、Ti okuhloswe ngazo zokuhlobisa
Ukuhlanzeka okuphezulu kwe-titanium alloy target material kunokumelana nokugqwala komoya okuhle kakhulu, ukusetshenziswa isikhathi eside emoyeni akushintshi umbala, ukuqinisekisa ukuthi umbala wangempela we-titanium nokuxhumana komuntu awuguli nezinye izici ezinhle kakhulu. Ngakho-ke, i-titanium yokuhlanzeka okuphezulu ingasetshenziswa njengezinto zokuhlobisa, eminyakeni yamuva, njengamasongo, amawashi kanye nezibuko kanye neminye imihlobiso enobumsulwa be-titanium ifinyelele izinga le-5N.
四、I-Ti iqondise kumasistimu wokumpompa i-vacuum ephezulu kakhulu
Njengensimbi esebenza ngamakhemikhali, i-titanium ingasabela ngezinto eziningi nezinhlanganisela ezingeni lokushisa eliphezulu. Ithagethi ye-titanium alloy yokuhlanzeka okuphezulu inamandla okukhangisa amagesi asebenzayo (afana ne-O2, N2, CO, CO2, umhwamuko wamanzi ongaphezu kuka-650°C), kanye nefilimu ye-Ti ehwamukayo odongeni lwephampu ingenza indawo engaphezulu esebenza ngokukhangayo okuphezulu. . Lesi sakhiwo senza i-Ti isetshenziswe kabanzi njenge-getter ohlelweni lokukhipha igesi ye-vacuum ephezulu kakhulu.Uma isetshenziselwa ukuthuthukisa iphampu, iphampu ye-sputtering ion, njll., ingenza ukucindezela kokugcina kokusebenza kwepompo ye-sputtering ion kube phansi njengo-10-9PA.