1. Ukulungiselela i-Sputtering
Kubaluleke kakhulu ukugcina i-vacuum chamber, ikakhulukazi i-sputtering system ihlanzekile. Noma iyiphi insalela eyakhiwe ngamafutha okugcoba, uthuli kanye nokunameka kwangaphambilini kuzoqoqa umhwamuko wamanzi nokunye ukungcola, okuzothinta ngokuqondile idigri ye-vacuum futhi kwandise amathuba okwehluleka ukwenza ifilimu. Isekhethi emfishane noma ukugoqa okuqondiwe, ifilimu elimaholoholo kanye nokungcola kwamakhemikhali okweqile kuvame ukubangelwa ikamelo lokufafaza elingcolile, isibhamu esifafazayo kanye nethagethi. Ukuze unamathele ezicini zokubunjwa kwe-coating, kuyadingeka ukuhlanza nokomisa igesi ye-sputtering (i-argon noma i-oxygen). Ngemuva kokuthi i-substrate ifakwe ekamelweni lokufafaza, umoya udinga ukukhishwa ukuze ufinyelele i-vacuum edingekayo ngenqubo. Isembozo esivikelayo endaweni emnyama, odongeni lwesigxobo kanye nendawo eseduze nayo kufanele igcinwe ihlanzekile. Lapho sihlanza igumbi le-vacuum, sikhuthaza ukusebenzisa ukuqhuma kwebhola lengilazi ukwelapha izingxenye ezinothuli, kanye nomoya ocindezelwe ukuze kukhishwe izinsalela zokufafaza zakuqala ezizungeze igumbi, bese sipholisha ngokuthula indawo engaphandle nge-sandpaper efakwe i-alumina. Ngemuva kokupholisha iphepha le-gauze, lihlanzwa ngotshwala, i-acetone namanzi angcolile. Ngokuhlangene, ikhuthaza ukusetshenziswa kwe-vacuum cleaner yezimboni ekuhlanzeni okuyisizayo. Okuhlosiwe okukhiqizwe yi-Gaozhan metal kupakishwe ezikhwameni zepulasitiki ezivalwe nge-vacuum,
I-ejenti eyakhelwe ngaphakathi yokuvikela umswakama. Uma usebenzisa okuqondiwe, sicela ungathinti okuqondiwe ngqo ngesandla sakho. Qaphela: uma usebenzisa okuqondiwe, sicela ugqoke amagilavu okulungisa ahlanzekile futhi angenalutho. Ungalokothi uthinte ilitshe ngqo ngezandla zakho
2, Ukuhlanza okuhlosiwe
Inhloso yokuhlanza okuhlosiwe ukukhipha uthuli noma ukungcola okungenzeka kube khona ebusweni bethagethi.
Ithagethi yensimbi ingahlanzwa ngezinyathelo ezine,
Isinyathelo sokuqala ukuhlanza ngendwangu ethambile yamahhala efakwe ku-acetone;
Isinyathelo sesibili sifana nesinyathelo sokuqala, ukuhlanza ngotshwala;
Isinyathelo sesi-3: hlanza ngamanzi angcolile. Ngemva kokugeza ngamanzi enziwe deionized, faka ilitshe kuhhavini bese uyomisa ku-100 ℃ imizuzu engu-30.
Ukuhlanzwa kwe-oxide ne-ceramic okuhlosiwe kuzokwenziwa "ngendwangu yamahhala".
Isinyathelo sesine ukugeza okuhlosiwe nge-argon nge-high pressure kanye negesi eliphansi lamanzi ngemva kokukhipha indawo enothuli, ukuze kukhishwe zonke izinhlayiya ezingcolile ezingase zenze i-arc ohlelweni lwe-sputtering.
3. Idivayisi eqondiwe
Enqubweni yokufakwa kwethagethi, u-Z ukuqapha okubalulekile wukuqinisekisa ukuxhumana okuhle kokusebenza okushisayo phakathi kwethagethi nodonga olupholisayo lwesibhamu esiqhumisayo. Uma i-warpage yesigxobo sokupholisa inzima noma i-warpage ye-back plate inzima, idivayisi eqondiwe izoqhekeka noma igobe, futhi ukuqhutshwa kwe-thermal kusuka kuthagethi yangemuva kuya kulokho okuqondiwe kuzothinteka kakhulu, okuzoholela ekuhlulekeni kokukhipha ukushisa. enqubweni yokufafaza, futhi ilitshe lizoqhekeka noma ligeje
Ukuze kuqinisekiswe ukuqhutshwa kwe-thermal, ungqimba lwephepha le-graphite lungafakwa phakathi kodonga lokupholisa lwe-cathode kanye nokuhlosiwe. Sicela unake ukuhlola ngokucophelela futhi wenze kucace ukuthamba kodonga olupholile lwesibhamu sokufafaza esisetshenziselwa ukuqinisekisa ukuthi i-O-ring ihlezi isendaweni.
Njengoba ukuhlanzeka kwamanzi okupholisa asetshenzisiwe kanye nothuli olungase lwenzeke ngesikhathi sokusebenza kwemishini luzofakwa ethangini lamanzi okupholisa i-cathode, kuyadingeka ukuhlola nokuhlanza ithangi lamanzi okupholisa i-cathode lapho ufaka okuhlosiwe ukuze uqinisekise ubushelelezi. ukujikeleza kwamanzi okupholisa nokuthi indawo yokungena nokuphuma ngeke ivinjwe.
Amanye ama-cathode ahlelwe ukuba abe nesikhala esincane ne-anode, ngakho-ke lapho ufaka okuhlosiwe, kuyadingeka ukuqinisekisa ukuthi akukho ukuthinta noma umqhubi phakathi kwe-cathode ne-anode, ngaphandle kwalokho isifunda esifushane sizokwenzeka.
Bheka Imanuwali yomsebenzisi wezisetshenziswa ukuze uthole ulwazi mayelana nendlela yokusebenzisa okuqondiwe ngendlela efanele. Uma lungekho ulwazi olunjalo kubhukwana lomsebenzisi, sicela uzame ukufaka idivayisi ngokuvumelana neziphakamiso ezifanele ezinikezwe i-Gaozhan metal. Uma uqinisa into eqondiwe, qala uqinise ibhawodi elilodwa ngesandla, bese uqinisa elinye ibhawudi kudiagonali ngesandla. Phinda lokhu kuze kuqiniswe wonke amabhawodi kudivayisi, bese uqinisa ngokuthile.
4. Ukuhlolwa kwesifunda esifushane nokuqina
Ngemuva kokuphothulwa kwedivayisi eqondiwe, kuyadingeka ukuhlola ukujikeleza okufushane nokuqina kwayo yonke i-cathode,
Kuhlongozwa ukunquma ukuthi kukhona yini isifunda esifushane ku-cathode ngokusebenzisa imitha yokumelana
Ukubandlululwa komugqa. Ngemva kokuqinisekisa ukuthi akukho ukujikeleza okufushane ku-cathode, ukutholakala kokuvuza kungenziwa, futhi amanzi angangeniswa ku-cathode ukuze kuqinisekiswe ukuthi kukhona ukuvuza kwamanzi.
5. Target pre sputtering
Ithagethi yangaphambi kokuchelela isekela ukuphalaza kwe-argon okumsulwa, okungahlanza indawo okuhlosiwe. Uma ithagethi iqhunyiswa ngaphambili, kukhuthazwa ukuthi kukhuliswe kancane amandla okufafaza, futhi izinga lokukhushulwa kwamandla wethagethi ye-ceramic ngu-1.5WH / cm2. Isivinini sangaphambili sokufafaza sethagethi yensimbi singaba phezulu kunaleso sebhulokhi yethagethi ye-ceramic, futhi izinga elizwakalayo lokukhuphuka kwamandla ngu-1.5WH / cm2.
Enqubweni ye-sputtering yangaphambili, sidinga ukubheka ukukhonjiswa kwethagethi. Isikhathi sangaphambi kokuchelela ngokuvamile siyimizuzu eyi-10. Uma ingekho into e-arcing, qhubeka ukhulisa amandla okukhafula
Kumandla asethiwe. Ngokusho kokuhlangenwe nakho, amandla amukelekile e-Z aphezulu okufafaza wethagethi yensimbi ngu
25watts / cm2, 10watts / cm2 yethagethi yobumba. Sicela ubheke isisekelo sokusetha kanye nolwazi lokucindezela kwegumbi le-vacuum ngesikhathi sokufafaza kumanuwali wokusebenza kwesistimu yomsebenzisi. Ngokuvamile, kufanele kuqinisekiswe ukuthi izinga lokushisa lamanzi lapho kuphuma amanzi okupholisa kufanele libe ngaphansi kuka-35 ℃, kodwa Z kubalulekile ukuqinisekisa ukuthi uhlelo lokujikeleza kwamanzi okupholisa lungasebenza ngempumelelo.
Ukujikeleza okusheshayo kwamanzi apholile kakhulu kuthatha ukushisa, okuyisiqinisekiso esibalulekile sokuqinisekisa ukuphafaza okuqhubekayo ngamandla amakhulu. Ngezinhloso zensimbi, ngokuvamile kukhuthazwa ukuthi ukugeleza kwamanzi okupholisa kube
Ingcindezi yamanzi engu-20lpm imayelana ne-5gmp; Ngezinhloso ze-ceramic, kuvame ukutuswa ukuthi ukugeleza kwamanzi kube ngu-30lpm futhi umfutho wamanzi ucishe ube ngu-9gmp.
6, Ukugcinwa kwethagethi
Ukuze uvimbele ukujikeleza okufushane kanye ne-arcing okubangelwa umgodi ongcolile enqubweni yokufafaza, kuyadingeka ukususa i-sputter eqoqwe phakathi nendawo nezinhlangothi zombili zethrekhi yokufafaza ngezigaba,
Lokhu futhi kusiza abasebenzisi ukuthi baqhume ngokuqhubekayo ku-z high power density
7. Isitoreji esiqondisiwe
Okuhlosiwe okuhlinzekwe ngensimbi ye-Gaozhan kupakishwe ezikhwameni zepulasitiki ze-vacuum ezinezingqimba ezimbili. Sikhuthaza ukuthi abasebenzisi bagcine okuhlosiwe, kungakhathaliseki ukuthi insimbi noma i-ceramic, emaphaketheni e-vacuum. Ikakhulukazi, izinhloso zokubopha zidinga ukugcinwa ngaphansi kwezimo ze-vacuum ukuze kuvinjelwe i-oxidation yesendlalelo sokubopha ukuthi singathinti ikhwalithi yokubopha. Maqondana nokupakishwa kwezinto ezihlosiwe zensimbi, sikhuthaza ukuthi i-Z ifakwe ezikhwameni zepulasitiki ezihlanzekile.
Isikhathi sokuthumela: May-13-2022