Izinto ezihlosiwe ezihlosiwe zinezidingo eziphezulu ngesikhathi sokusetshenziswa, hhayi kuphela ubumsulwa nosayizi wezinhlayiyana, kodwa futhi nosayizi wezinhlayiyana ezifanayo. Lezi zidingo eziphezulu zisenza sinake kakhulu uma sisebenzisa izinto eziqondiswe ku-sputtering.
1. Ukulungiselela i-sputtering
Kubaluleke kakhulu ukugcina ukuhlanzeka kwekamelo le-vacuum, ikakhulukazi uhlelo lokuphalaza. Izinto zokugcoba, uthuli, nanoma yiziphi izinsalela ezivela ezingxenyeni zangaphambilini zingaqongelela ukungcola okunjengamanzi, okuthinta ngokuqondile indawo engenalutho futhi kwandise amathuba okwehluleka ukubunjwa kwefilimu. Amasekhethi amafushane, i-targe arcing, izindawo ezakha amafilimu amaholoholo, nokungcola kwamakhemikhali okweqile kuvame ukubangelwa amagumbi okufafaza angcolile, izibhamu nezinto ezihlosiwe.
Ukuze kugcinwe izici zokuhlanganisa ze-coating, igesi ye-sputtering (i-argon noma i-oxygen) kufanele ihlanzeke futhi yome. Ngemva kokufaka i-substrate ekamelweni lokufafaza, umoya udinga ukukhishwa ukuze kufinyelele izinga elidingekayo le-vacuum yenqubo.
2. Ukuhlanza okuhlosiwe
Inhloso yokuhlanza okuqondiwe ukukhipha noma yiluphi uthuli noma ukungcola okungase kube khona ebusweni bethagethi.
3. Ukufakwa okuhlosiwe
Into ebaluleke kakhulu okufanele uyinake ngesikhathi sokufakwa kwento ehlosiwe ukuqinisekisa ukuxhumana okuhle okushisayo phakathi kwezinto ezihlosiwe kanye nodonga olupholile lwesibhamu se-sputtering. Uma udonga olupholile noma ipuleti elingemuva lisontekile kakhulu, lingabangela ukuqhekeka noma ukugoba ngesikhathi sokufakwa kwezinto eziqondiwe. Ukudluliswa kokushisa okusuka kulokho okuqondiwe emuva kuya kokuhlosiwe kuzothinteka kakhulu, okuzoholela ekungakwazini ukukhipha ukushisa ngesikhathi sokufafaza, ekugcineni kuholele ekuqhekekeni noma ekuphambukeni kwento ehlosiwe.
4. Ukuhlolwa kwesifunda esifushane nokubekwa uphawu
Ngemuva kokufakwa kwezinto ezihlosiwe, kuyadingeka ukuhlola isifunda esifushane nokubekwa uphawu kwe-cathode yonke. Kunconywa ukusebenzisa i-ohmmeter kanye ne-megohmmeter ukuze unqume ukuthi i-cathode ifushane. Ngemva kokuqinisekisa ukuthi i-cathode ayifinyeziwe, ukutholakala kokuvuza kungenziwa ngokujova amanzi ku-cathode ukuze kutholakale ukuthi kukhona yini ukuvuza.
5. Impahla ehlosiwe yangaphambi kwe-sputtering
Kunconywa ukusebenzisa igesi ye-argon ehlanzekile yokufafaza kwangaphambili kwezinto ezihlosiwe, ezingahlanza ingaphezulu lempahla eqondiwe. Kunconywa ukuthi ukhuphule kancane amandla okufafaza ngesikhathi senqubo yokufafaza okuhlosiwe. Amandla we-ceramic target material
Isikhathi sokuthumela: Oct-19-2023