Kufanele sijwayelane kakhulu nethagethi manje, manje imakethe eqondiwe nayo iyakhula, okulandelayo yilokho ukusebenza okuyinhloko kwethagethi ye-sputtering eyabiwe umhleli ovela ku-RSM
Ubumsulwa
Ukuhlanzeka kwezinto ezihlosiwe kungenye yezinkomba zokusebenza eziyinhloko, ngoba ukuhlanzeka kwezinto ezihlosiwe kunethonya elikhulu ekusebenzeni kwefilimu encane. Kodwa-ke, ekusebenzeni okungokoqobo, izidingo zokuhlanzeka kwezinto ezihlosiwe azifani. Isibonelo, ngokuthuthuka okusheshayo kwemboni ye-microelectronics, usayizi we-silicon chip uthuthukiswe kusuka ku-6 ", 8" kuya ku-12", futhi ububanzi bezintambo buncishisiwe ukusuka ku-0.5um kuya ku-0.25um,0.18um noma ngisho no-0.13um. Ngaphambilini, ubumsulwa bento ehlosiwe engu-99.995% ingahlangabezana nezidingo zenqubo engu-0.35umIC. Ukuhlanzeka kwezinto ezihlosiwe kungu-99.999% noma ngisho no-99.9999% wokulungiswa kwemigqa engu-0.18um.
Okuqukethwe ukungcola
Ukungcola okuqinile okuhlosiwe kanye nomoya-mpilo kanye nomhwamuko wamanzi ezimbotsheni kuyimithombo eyinhloko yokungcoliswa kwefilimu. Izinto eziqondiwe ngezinjongo ezihlukene zinezidingo ezihlukene zokuqukethwe okungcolile okuhlukile. Isibonelo, i-aluminium ehlanzekile ne-aluminium alloy targets esetshenziswa embonini ye-semiconductor inezidingo ezikhethekile zokuqukethwe kwezinsimbi ze-alkali nezici zemisebe.
Ukuminyana
Ukuze kuncishiswe i-porosity ekuqineni okuqondiwe futhi kuthuthukiswe ukusebenza kwefilimu ye-sputtering, ukuminyana okuphezulu kwethagethi ngokuvamile kuyadingeka. Ukuminyana kwethagethi akuthinti kuphela izinga lokufafaza kodwa futhi izici zikagesi nezokubona zefilimu. Uma kuphezulu ukuminyana okuqondiwe, kuba ngcono ukusebenza kwefilimu. Ukwengeza, ukukhulisa ukuminyana namandla okuqondiwe kwenza okuqondiwe kube ngcono ukumelana nengcindezi yokushisa enqubweni yokufafaza. Ukuminyana nakho kungenye yezinkomba zokusebenza ezibalulekile zethagethi.
Usayizi wokusanhlamvu nokusabalalisa usayizi wokusanhlamvu
Okuhlosiwe kuvame ukuba yi-polycrystalline enosayizi wokusanhlamvu osuka ku-micrometer ukuya kumamilimitha. Okokuhlosiwe okufanayo, izinga lokufafaza lalokho okuhlosiwe okusanhlamvu okuncane liyashesha kunalelo eliqondiwe elinezinhlamvu ezinkulu. Ukusatshalaliswa kogqinsi kwamafilimu adiphozithwe yithagethi ye-sputtering enomehluko omncane kasayizi wokusanhlamvu (ukusabalalisa okufanayo) kufana kakhulu.
Isikhathi sokuthumela: Aug-04-2022