Isingeniso somsebenzi nokusetshenziswa kwethagethi

Mayelana nomkhiqizo ohlosiwe, manje imakethe yohlelo lokusebenza ibanzi kakhulu futhi ibanzi, kepha kusekhona abanye abasebenzisi abangaqondi kahle mayelana nokusetshenziswa kokuhlosiwe, vumela ochwepheshe boMnyango wezobuchwepheshe we-RSM benze isingeniso esiningiliziwe ngakho,

　　1. I-Microelectronics

Kuzo zonke izimboni zezicelo, imboni ye-semiconductor inezidingo ezidinga kakhulu zekhwalithi yefilimu ehlosiwe. Ama-silicon wafers angama-intshi angu-12 (300 epistaxis) manje akhiqizwa. Ububanzi boxhumano buyehla. Abakhiqizi be-silicon wafer badinga usayizi omkhulu, ukuhlanzeka okuphezulu, ukuhlukaniswa okuphansi kanye nokusanhlamvu okuhle kwethagethi, okudinga i-microstructure engcono yethagethi ekhiqiziwe.

　　2, isibonisi

I-Flat panel display (FPD) ibe nomthelela omkhulu kumonitha wekhompiyutha esekelwe ku-cathode-ray (CRT) -based based kanye nemakethe yethelevishini phakathi neminyaka edlule, futhi izoqhuba ubuchwepheshe nesidingo semakethe sezinto eziqondiwe ze-ITO. Kunezinhlobo ezimbili ze-iTO targets. Enye iwukusebenzisa i-nanometer state ye-indium oxide ne-tin oxide powder ngemva kokucwilisa, enye iwukusebenzisa i-indium tin alloy target.

　　3. Isitoreji

Ngokuphathelene nobuchwepheshe bokugcina, ukuthuthukiswa kwama-hard disks aphezulu kanye nomthamo omkhulu kudinga inani elikhulu lezinto zefilimu zokungafuni ukungafuni. Ifilimu eyinhlanganisela ye-CoF~Cu ye-multilayer iyisakhiwo esisetshenziswa kakhulu sefilimu enkulukazi yokungabaza. I-TbFeCo alloy target material edingekayo ku-magnetic disc isathuthukiswa. Idiski kazibuthe ekhiqizwe nge-TbFeCo inezici zomthamo omkhulu wokugcina, impilo ende yesevisi kanye nokusuleleka okuphindaphindiwe kokungathinteki.

　　Ukuthuthukiswa kwezinto eziqondiwe:

Izinhlobo ezahlukahlukene zezinto ezisetshenziswayo zefilimu ezincanyana zisetshenziswe kabanzi kumasekethe ahlanganisiwe we-semiconductor (VLSI), amadiski optical, imibukiso ye-planar kanye nokumbozwa kwendawo yokusebenza. Kusukela ngeminyaka yawo-1990s, ukuthuthukiswa okuhambisanayo kwezinto ezihlosiwe ze-sputtering kanye nobuchwepheshe be-sputtering kuye kwahlangabezana kakhulu nezidingo zokuthuthukiswa kwezingxenye ezintsha ze-elekthronikhi.