Sonke siyazi ukuthi i-sputtering ingenye yobuchwepheshe obuyinhloko bokulungiselela izinto zefilimu. Isebenzisa ama-ion akhiqizwa umthombo we-ion ukusheshisa ukuhlanganisa ku-vacuum ukuze kwakheke uthango lwe-ion olunesivinini esikhulu, ibhomu indawo eqinile, kanye nama-ion ashintshanisa amandla e-kinetic nama-athomu endaweni eqinile, ukuze ama-athomu endaweni eqinile. shiya okuqinile futhi ubeke endaweni engaphansi. Okuqinile okubhomuliwe kuyizinto ezingavuthiwe zokufaka ifilimu ngokufafaza, okubizwa nge-sputtering target.
Izinhlobo ezahlukahlukene zezinto zefilimu ezihlakazekile zisetshenziswe kabanzi kumasekethe ahlanganisiwe we-semiconductor, imidiya yokuqopha, isibonisi se-planar, ithuluzi kanye ne-die surface coating njalonjalo.
Okuhlosiwe kwe-sputtering kusetshenziswa kakhulu ezimbonini ze-elekthronikhi nezolwazi, njengamasekethe ahlanganisiwe, ukugcinwa kolwazi, izibonisi zekristalu eliwuketshezi, izinkumbulo ze-laser, izinto zokulawula zikagesi, njll; Ingasetshenziswa futhi emkhakheni we-glass coating; Ingasetshenziswa nasezintweni ezingagugi, ukumelana nokugqwala kwamazinga okushisa aphezulu, imikhiqizo yokuhlobisa ephezulu kanye nezinye izimboni.
Kunezinhlobo eziningi zokuhloswe kwe-sputtering, futhi kunezindlela ezahlukene zokuhlukanisa okuhlosiwe:
Ngokusho kokwakheka, ingahlukaniswa ngethagethi yensimbi, i-alloy target kanye ne-ceramic compound target.
Ngokusho komumo, ingahlukaniswa ngethagethi ende, ithagethi yesikwele kanye nethagethi eyindilinga.
Ingahlukaniswa ngethagethi ye-microelectronic, ithagethi yokurekhoda kazibuthe, i-optical disk target, i-precious metal target, i-target resistance target, i-conductive film target, i-face modification target, i-mask target, i-target layer yokuhlobisa, i-electrode target kanye nezinye izinhloso ngokuvumelana nensimu yesicelo.
Ngokwezinhlelo zokusebenza ezihlukene, ingahlukaniswa ibe okuhlosiwe okuhlobene ne-semiconductor ye-ceramic, ukurekhoda okuqondiwe kwe-ceramic okumaphakathi, okuhlosiwe kwe-ceramic, okuhlosiwe kwe-superconducting ceramic kanye nezinhloso ezinkulu ze-ceramic ze-magnetoresistance.
Isikhathi sokuthumela: Jul-29-2022