Njengamanje, cishe zonke izinhloso zethusi zensimbi ehlanzekile esezingeni eliphezulu ezidingwa imboni ye-IC ziphethwe izinkampani ezinkulu zamazwe ngamazwe eziningana. Zonke izinhloso zethusi ezidingwa yimboni yasekhaya ye-IC zidinga ukungeniswa kwamanye amazwe, okungabizi nje kuphela, kodwa futhi eziyinkimbinkimbi ezinqubweni zokungeniswa kwamanye amazwe Ngakho-ke, i-China idinga ngokuphuthumayo ukuthuthukisa ukuthuthukiswa nokuqinisekisa izinhloso zokuqhunyiswa kwe-copper sputtering ultra-high (6N) . Ake sibheke amaphuzu abalulekile kanye nobunzima ekuthuthukisweni kokuhlanzeka okuphezulu kakhulu (6N) okuhlosiwe kwe-copper sputtering.
1,Ukuthuthukiswa kwezinto zokuhlanzeka okuphezulu kakhulu
Ubuchwepheshe bokuhlanzwa kwezinsimbi ze-Cu, i-Al kanye ne-Ta e-China bukude nokwezimboni ezithuthukile. Njengamanje, izinsimbi eziningi ezihlanzeke kakhulu ezinganikezwa azikwazi ukuhlangabezana nezidingo zekhwalithi zamasekethe ahlanganisiwe ukuze kuhlonzwe i-sputtering ngokuya ngendlela evamile yazo zonke izindlela zokuhlaziya izinto embonini. Inani lokufakwa kokuhlosiwe liphezulu kakhulu noma alisatshalaliswanga ngokungalingani. Izinhlayiya zivame ukwakheka ku-wafer ngesikhathi sokufafaza, okuholela ekujikelezeni okufushane noma isekethe evulekile yokuxhuma, okuthinta kakhulu ukusebenza kwefilimu.
2,Ukuthuthukiswa kobuchwepheshe bokulungiselela i-copper sputtering
Ukuthuthukiswa kobuchwepheshe bokulungiselela i-copper sputtering target ikakhulukazi kugxile ezicini ezintathu: usayizi wokusanhlamvu, ukulawula ukuma nokufana. Imboni ye-semiconductor inezidingo eziphakeme kakhulu zokuhloswa kwe-sputtering kanye nezinto zokusetshenziswa ezihwamukayo. Inezidingo eziqinile zokulawula usayizi wezinhlamvu ezingaphezulu kanye nokuma kwekristalu kwethagethi. Usayizi wokusanhlamvu wethagethi kufanele ulawulwe ku-100μ M ngezansi, ngakho-ke, ukulawulwa kosayizi wokusanhlamvu kanye nezindlela zokuhlaziya nokuhlonza ukuhlobana kubaluleke kakhulu ekuthuthukisweni kwethagethi yensimbi.
3,Ukuthuthukiswa kokuhlaziya kanyeukuhlola ubuchwepheshe
Ukuhlanzeka okuphezulu kwalokho okuhlosiwe kusho ukuncishiswa kokungcola. Esikhathini esedlule, i-plasma ehlanganiswe nge-inductively (ICP) kanye ne-atomic absorption spectrometry yayisetshenziselwa ukunquma ukungcola, kodwa eminyakeni yamuva nje, ukuhlaziywa kwekhwalithi ye-glow discharge (GDMS) nokuzwela okuphezulu kuye kwasetshenziswa kancane kancane njengendlela evamile. indlela. Indlela ye-RRR eyinsalela yokumelana isetshenziswa kakhulu ekunqumeni ubumsulwa bukagesi. Umgomo wayo wokunquma ukuhlola ukuhlanzeka kwesisekelo sensimbi ngokukala izinga lokusatshalaliswa kokungcola nge-elekthronikhi. Ngenxa yokuthi ukulinganisa ukumelana ekamelweni lokushisa kanye nezinga lokushisa eliphansi kakhulu, kulula ukuthatha inombolo. Eminyakeni yamuva, ukuze uhlole ingqikithi yezinsimbi, ucwaningo lokuhlanzeka okuphezulu kakhulu lusebenza kakhulu. Kulokhu, inani le-RRR liyindlela engcono kakhulu yokuhlola ubumsulwa.
Isikhathi sokuthumela: May-06-2022