I-Rich Special Material Co., Ltd. ingakhiqiza okuhlosiwe okuhlanzekile kwe-aluminiyamu ephezulu, okuqondiwe kokuphalaza ithusi, okuhlosiwe kwe-tantalum sputtering, okuhlosiwe kwe-titanium sputtering, njll. embonini ye-semiconductor.
Ama-chips e-semiconductor anezidingo zobuchwepheshe eziphezulu kanye namanani aphezulu okuhloswe kwe-sputtering. Izidingo zabo zokuhlanzeka kanye nobuchwepheshe bezinhloso ze-sputtering ziphakeme kunezibonisi zamaphaneli ayisicaba, amaseli elanga nezinye izinhlelo zokusebenza. Ama-Semiconductor chips asetha izindinganiso eziqine ngokwedlulele ekuhlanzekeni kanye nesakhiwo esincane sangaphakathi sokuhlosiwe kwe-sputtering. Uma okuqukethwe kokungcola kwethagethi ye-sputtering kuphezulu kakhulu, ifilimu eyenziwe ayikwazi ukuhlangabezana nezakhiwo zikagesi ezidingekayo. Enqubweni ye-sputtering, kulula ukwenza izinhlayiya ku-wafer, okuholela ekulimazeni okufushane noma ukujikeleza kwesifunda, okuthinta kakhulu ukusebenza kwefilimu. Ngokuvamile, umgomo ophezulu we-purity sputtering uyadingeka ekukhiqizeni ama-chip, okuvamise ukuba ngu-99.9995% (5N5) noma ngaphezulu.
Okuhlosiwe kwe-sputtering kusetshenziselwa ukwakhiwa kwezingqimba zokuvimbela kanye nokupakisha izendlalelo zezintambo zensimbi. Enqubweni yokukhiqiza ama-wafer, okuqondiwe kusetshenziswa ikakhulukazi ukwenza ungqimba olubambayo, ungqimba lwezithiyo kanye negridi yensimbi yewafer. Enqubweni yokupakishwa kwe-chip, i-sputtering target isetshenziselwa ukukhiqiza izendlalelo zensimbi, izendlalelo zezintambo nezinye izinto zensimbi ngaphansi kwamaqhubu. Yize inani lezinto ezihlosiwe ezisetshenziswa ekukhiqizweni kwe-wafer kanye nokupakishwa kwama-chip lilincane, ngokwezibalo ze-SEMI, izindleko zezinto eziqondiwe ekukhiqizeni ama-wafer kanye nenqubo yokupakisha zibalelwa ku-3%. Kodwa-ke, ikhwalithi yethagethi ye-sputtering ithinta ngokuqondile ukufana nokusebenza kwesendlalelo se-conductive kanye nesendlalelo sokuvimbela, ngaleyo ndlela kuthinte isivinini sokudlulisela nokuzinza kwe-chip. Ngakho-ke, i-sputtering target ingenye yezinto zokusetshenziswa eziyinhloko zokukhiqizwa kwe-semiconductor
Isikhathi sokuthumela: Nov-16-2022