Umxhumanisi wezobuchwepheshe we-RSM uzokwabelana nawe ngezinzuzo ze-cylindrical kanye ne-planar magnetron sputtering targets? Uma kuqhathaniswa namanye amathagethi e-magnetron sputtering, amathagethi e-cylindrical kanye ne-planar magnetron sputtering agcina izinzuzo zokufana okuhle kokunamathela kokuhlosiwe kwepulani elingunxande, futhi angakhulisa ukusetshenziswa kokuhlosiwe ngezindlela ezimbili ezilandelayo:
(1) Lapho amaqembu amabili (amane) emigodi ye-annular ebusweni bethagethi efinyelela ekujuleni okuthile, umgogodla ohlosiwe (ingxenye kazibuthe) ingazungeziswa ngama-45 ° ngokuqhathaniswa neshubhu eliqondiwe, ukuze ezinye izindawo eziseshubhuni eliqondiwe. ezingagqwalile zingasetshenziswa;
(2) Lapho umgogodla ohlosiwe wethagethi ye-cylindrical kanye ne-planar sputtering ye-magnetron yakhelwe njengomongo ojikelezayo wethagethi (umgogodla oqondiwe uyazungeza ngesikhathi sokufafaza), indawo engaphezulu yethagethi ingahlakazwa ngokulinganayo isuke isendlalelo ngongqimba ngaphandle kwemigodi. Ngalesi sikhathi, okuhlosiwe kuzosetshenziswa ngempumelelo kakhulu, futhi izinga lokusebenzisa lokho okuhlosiwe lingafinyelela ku-50% ~ 60% Uma impahla eqondiwe kuyinsimbi eyigugu, lokhu ngokusobala kubaluleke kakhulu.
Ngokusebenzisa isimiso sikazibuthe esinesicathulo sesigxobo ku-coaxial cylindrical magnetron sputtering target ukuze kuxazululwe inkinga yendawo kazibuthe, inhloso yendiza engunxande ingaguqulwa ibe yitshe le-cylindrical kanye ne-planar magnetron sputtering target, Ithagethi ingakhuphula izinga lokusebenzisa lethagethi. ngenkathi igcina ukufana okuhle kokunamathela kwethagethi yendiza engunxande Ukuze kuthuthukiswe izinzuzo zezomnotho.
Isikhathi sokuthumela: Jul-04-2022