Amafilimu azacile ayaqhubeka nokudonsa ukunaka kwabacwaningi. Lesi sihloko sethula ucwaningo lwamanje nolujulile mayelana nezicelo zabo, izindlela eziguquguqukayo zokubeka, kanye nokusetshenziswa kwesikhathi esizayo.
“Ifilimu” igama elihlobene lezinto ezinezinhlangothi ezimbili (2D) ezacile kakhulu kune-substrate yayo, noma ngabe ihloselwe ukumboza ingxenye engaphansi noma ihlanganiswe phakathi kwezindawo ezimbili. Ezinhlelweni zamanje zezimboni, ukujiya kwalawa mafilimu azacile kuvame ukuhluka ukusuka kubukhulu be-athomu engaphansi kwe-nanometer (nm) (okungukuthi, <1 nm) ukuya kuma-micrometer (μm). Igraphene yongqimba olulodwa inogqinsi lwe-athomu yekhabhoni eyodwa (okungukuthi ~0.335 nm).
Amafilimu ayesetshenziselwa izinjongo zokuhlobisa kanye nezithombe ezikhathini zangaphambi komlando. Namuhla, izinto zokunethezeka nobucwebe zimbozwe amafilimu amancane ezinsimbi eziyigugu njengethusi, isiliva, igolide neplatinamu.
Ukusetshenziswa okuvame kakhulu kwamafilimu ukuvikela okubonakalayo kwendawo engaphezulu ekuhuzukeni, emthelela, imihuzuko, ukuguguleka nokuhuzuka. Ikhabhoni efana nedayimane (i-DLC) ne-MoSi2 isetshenziselwa ukuvikela izinjini zezimoto ekugugeni nasekugxumeni kwezinga lokushisa eliphezulu okubangelwa ukungqubuzana phakathi kwezingxenye ezinyakazayo.
Amafilimu azacile nawo asetshenziselwa ukuvikela izindawo ezisebenzayo emvelweni, noma ngabe i-oxidation noma i-hydration ngenxa yomswakama. Amafilimu e-Shielding conductive athole ukunakwa okukhulu emikhakheni yamadivayisi we-semiconductor, izihlukanisi zefilimu ye-dielectric, ama-electrode amafilimu amancane, kanye nokuphazanyiswa kwe-electromagnetic (EMI). Ikakhulukazi, ama-metal oxide field effect transistors (ama-MOSFET) aqukethe amafilimu e-dielectric azinzile ngamakhemikhali futhi azinzile njenge-SiO2, kanye nama-semiconductors ensimbi e-oxide (CMOS) aqukethe amafilimu ethusi aqhubayo.
Ama-electrode amafilimu azacile akhuphula isilinganiso sokuminyana kwamandla kuvolumu yama-supercapacitor izikhathi ezimbalwa. Ngaphezu kwalokho, amafilimu amancane ensimbi kanye nama-MXenes okwamanje (i-transition metal carbides, nitrides noma carbonitrides) amafilimu amancane e-perovskite e-ceramic asetshenziswa kabanzi ukuvikela izingxenye ze-elekthronikhi ekuphazamisekeni kuka-electromagnetic.
Ku-PVD, into ehlosiwe ifakwa umhwamuko futhi idluliselwe ku-vacuum room equkethe i-substrate. Umhwamuko uqala ukubeka phezu kwe-substrate ngenxa nje yokufingqa. Ivacuum ivimbela ukuhlangana kokungcola nokushayisana phakathi kwama-molecule omhwamuko nama-molecule egesi ayinsalela.
Isiyaluyalu esingeniswe kusitimu, izinga lokushisa, izinga lokugeleza kwesitimu, kanye nokushisa okucashile kwento eqondiwe kudlala indima ebalulekile ekunqumeni ukufana kwefilimu nesikhathi sokucubungula. Izindlela zokuhwamuka zihlanganisa ukufudumeza okuphikisayo, ukufudumeza kwe-electron beam futhi, muva nje, i-epitaxy ye-molecular beam.
Ububi be-PVD evamile ukungakwazi kwayo ukuhwamulisa izinto ezincibilikayo eziphakeme kakhulu kanye noshintsho lwesakhiwo olwenziwa ezintweni ezidiphozithiwe ngenxa yenqubo yokuhwamuka kwe-condensation. I-Magnetron sputtering iyindlela yesizukulwane esilandelayo yokubeka umzimba exazulula lezi zinkinga. Ku-magnetron sputtering, ama-molecule okuhlosiwe ayakhishwa (afafazwe) ngokuqhunyiswa ngamabhomu ngama-ion anamandla ngokusebenzisa insimu kazibuthe ekhiqizwe i-magnetron.
Amafilimu azacile athatha indawo ekhethekile kumishini yesimanje ye-elekthronikhi, i-optical, mechanical, photonic, eshisayo nekazibuthe ngisho nezinto zokuhlobisa ngenxa yokuhlukahluka kwawo, ukubumbana kanye nezakhiwo zokusebenza. I-PVD ne-CVD izindlela ezivame ukusetshenziswa kakhulu zokubeka umhwamuko ukuze kukhiqizwe amafilimu amancanyana asukela kugqinsi ukusuka kuma-nanometer ambalwa kuye kuma-micrometer ambalwa.
I-morphology yokugcina yefilimu efakiwe ithinta ukusebenza kwayo nokusebenza kahle kwayo. Kodwa-ke, amasu okufakwa kwefilimu emincane ehwamukayo adinga ucwaningo olwengeziwe ukuze ubikezele ngokunembile izakhiwo zefilimu elincanyana ngokusekelwe kokufakwayo kwenqubo etholakalayo, izinto eziqondiwe ezikhethiwe, kanye nezakhiwo ze-substrate.
Imakethe ye-semiconductor yomhlaba wonke ingene esikhathini esijabulisayo. Isidingo sobuchwepheshe be-chip sikhuthaze futhi sabambezela ukuthuthukiswa kwemboni, futhi ukushoda kwamanje kwama-chip kulindeleke ukuthi kuqhubeke isikhathi esithile. Izindlela ezikhona manje kungenzeka zilolonge ikusasa lemboni njengoba lokhu kuqhubeka
Umehluko omkhulu phakathi kwamabhethri asekelwe ku-graphene namabhethri esimo esiqinile ukwakheka kwama-electrode. Nakuba ama-cathodes evame ukuguqulwa, ama-allotropes ekhabhoni angasetshenziswa ukwenza ama-anode.
Eminyakeni yamuva nje, i-inthanethi Yezinto isetshenziswe ngokushesha cishe kuzo zonke izindawo, kodwa ibaluleke kakhulu embonini yezimoto zikagesi.
Isikhathi sokuthumela: Apr-23-2023