Tungsten Silicide Pieces

Tungsten silicide WSi2 ni a lo bi ohun elo mọnamọna ina ni microelectronics, shunting lori awọn okun waya polysilicon, ibora anti-oxidation ati ideri okun waya resistance. Silicide Tungsten jẹ ohun elo olubasọrọ ni microelectronics, pẹlu resistivity ti 60-80μΩcm. O ti ṣẹda ni 1000 ° C. O maa n lo bi shunt fun awọn laini polysilicon lati mu iṣesi rẹ pọ si ati mu iyara ifihan pọ si. Layer Silicide tungsten le ṣe pese sile nipasẹ ifasilẹ oru kemikali, gẹgẹbi ifisilẹ oru. Lo monosilane tabi dichlorosilane ati tungsten hexafluoride bi gaasi ohun elo aise. Fiimu ti a fi silẹ jẹ ti kii ṣe stoichiometric ati pe o nilo annealing lati yipada si fọọmu stoichiometric conductive diẹ sii.

Silicide Tungsten le rọpo fiimu tungsten tẹlẹ. Silicide Tungsten jẹ tun lo bi ipele idena laarin ohun alumọni ati awọn irin miiran.

Silicide Tungsten tun jẹ iwulo pupọ ni awọn ọna ṣiṣe microelectromechanical, laarin eyiti tungsten silicide jẹ lilo akọkọ bi fiimu tinrin fun iṣelọpọ microcircuits. Fun idi eyi, tungsten silicide film le jẹ pilasima-etched nipa lilo, fun apẹẹrẹ, silicide.

Awọn ohun elo Pataki Ọlọrọ ṣe amọja ni iṣelọpọ ti ibi-afẹde Sputtering ati pe o le ṣe agbejade Silicide Tungstenonagẹgẹ bi Onibara 'ni pato. Fun alaye diẹ sii, jọwọ kan si wa.