Bayi siwaju ati siwaju sii awọn olumulo loye awọn iru ti afojusun atiAwọn ohun elo rẹ, ṣugbọn ipinpin rẹ le ma jẹ kedere. Bayi jẹ ki aRSM ẹlẹrọ pin pẹlu rẹdiẹ ninu awọn induction ti magnetron sputtering fojusi.
Ibi-afẹde sputtering: ibi-afẹde ti a bo irin sputtering, ibi-afẹde ohun elo alloy sputtering, ibi-afẹde seramiki sputtering ibi-afẹde, ibi-afẹde sputtering seramiki, ibi-afẹde seramiki carbide, ibi-afẹde sputtering seramiki fluoride, ibi-afẹde sputtering seramiki nitride, ibi-afẹde seramiki seramiki, ibi-afẹde seramiki seramiki, ibi-afẹde seramiki sputtering selenide. afojusun, seramiki sulfide afojusun sputtering, telluride seramiki sputtering afojusun, miiran seramiki afojusun, Chromium doped silikoni oxide seramiki afojusun (CR SiO), indium phosphide afojusun (INP), asiwaju arsenide afojusun (pbas), indium arsenide afojusun (InAs).
Sisọtọ Magnetron ti pin si awọn oriṣi meji: sputtering DC ati RF sputtering. Ilana ti ohun elo sputtering DC jẹ rọrun, ati pe oṣuwọn rẹ tun yara nigbati o ba n tu irin. RF sputtering jẹ lilo pupọ. Ni afikun si sputtering conductive data, o tun le sputter ti kii-conductive data. Ibi-afẹde sputtering tun le ṣee lo fun sputtering ifaseyin lati ṣeto data akojọpọ gẹgẹbi awọn oxides, nitrides ati awọn carbides. Ti igbohunsafẹfẹ RF ba pọ si, yoo di sputtering pilasima makirowefu. Ni lọwọlọwọ, itanna cyclotron resonance (ECR) makirowefu sputtering pilasima ni a lo nigbagbogbo.
Akoko ifiweranṣẹ: Oṣu Karun-26-2022