Fifọ igbale ni yiyan ti awọn ohun elo ibi-afẹde ti jẹ ọran fun eniyan, ni lọwọlọwọ, bi ibora sputtering, paapaa idagbasoke ti awọn ọgbọn ibora sputtering magnetron, ni a le sọ fun alaye eyikeyi lati ni anfani lati fojusi igbaradi ohun elo ti awọn fiimu tinrin. nipasẹ ion bombardment, nitori nipasẹ sputtering awọn ohun elo ibi-afẹde ninu ilana ti ibora si iru sobusitireti, ni ipa pataki lori didara fiimu sputtering, Nitorinaa, awọn ibeere ohun elo ibi-afẹde jẹ diẹ sii. stringent. Nibi a yoo kọ ẹkọ nipa ipa ti ibi-afẹde sputtering ni ibora igbale papọ pẹlu Olootu ti Isinmi Beijing
一, Ilana yiyan ati ipinsi awọn ohun elo ibi-afẹde
Ninu yiyan ohun elo ibi-afẹde, ni afikun si lilo fiimu funrararẹ yẹ ki o yan, awọn iṣoro wọnyi yẹ ki o tun gbero:
Isoro 1. Gẹgẹbi lilo ati awọn ibeere iṣẹ ti awo ilu, o jẹ dandan fun ohun elo ibi-afẹde lati pade awọn ibeere imọ-ẹrọ ti mimọ, akoonu iwe irohin, iṣọkan paati, iṣedede ẹrọ ati bẹbẹ lọ.
Isoro 2. Awọn ohun elo ti afojusun yẹ ki o ni agbara ẹrọ ti o dara ati iduroṣinṣin kemikali lẹhin ti o ṣẹda fiimu;
Isoro 3. O jẹ dandan fun ohun elo fiimu lati ṣe agbejade fiimu ti o ni irọrun pẹlu gaasi ifaseyin bi fiimu ifaseyin sputtering;
Isoro 4. O jẹ dandan lati ṣeto ibi-afẹde ati matrix lati jẹ alagbara, bibẹẹkọ, awọn ohun elo fiimu ti o ni itọpa ti o dara pẹlu matrix yẹ ki o gba, akọkọ sputter kan Layer ti fiimu isalẹ ati lẹhinna mura Layer fiimu ti a beere;
Ibeere 5. Lori ipilẹ ti ipade awọn ibeere iṣẹ ti fiimu naa, iyatọ ti o kere julọ laarin imugboroja imugboroja gbona ti ibi-afẹde ati matrix, ti o dara julọ, ki o le dinku ipa ti aapọn ti o gbona ti fiimu sputtering;
Igbaradi ti ọpọlọpọ awọn ibi-afẹde ti o wọpọ
(1) cr afojusun
Chromium bi ohun elo fiimu sputtering kii ṣe rọrun nikan lati darapo pẹlu awọn ohun elo ipilẹ ni o ni isunmọ giga, ati chromium ati oxide CrQ3 fiimu, awọn ohun-ini ẹrọ rẹ, resistance acid ati iduroṣinṣin gbona dara julọ.
Beijing Ruichi High-tech Co., Ltd. ni akọkọ ti n ṣiṣẹ ni: ibi-afẹde zirconium ibi-afẹde titanium, ibi-afẹde aluminiomu, ibi-afẹde nickel, ibi-afẹde chromium, ibi-afẹde tungsten, ibi-afẹde molybdenum, ibi-afẹde bàbà, ibi-afẹde silikoni, ibi-afẹde niobium, ibi-afẹde tantalum, titanium-silicon alloy afojusun, titanium-niobium alloy afojusun, titanium-tungsten alloy afojusun, titanium-zirconium alloy afojusun, nickel-chromium alloy ibi-afẹde, ibi-afẹde alloy silica-aluminium, nickel-vanadium alloy target, chromium-aluminum-silicon ternary alloy target, Ti al si ternary alloy target material, ti a lo ni lilo pupọ ni ohun ọṣọ / dada lile ati bo iṣẹ, gilasi ayaworan, ifihan alapin / opitika photoelectric , opitika ipamọ, Electronics, titẹ sita ati awọn miiran-oojo.
Akoko ifiweranṣẹ: Jun-02-2022