Ithagethi yesinyithi ibhekiselele kwizinto ezicetywayo ze-high-speed-power-carrying particles ezichaphazelekayo. Ukongeza, ngokutshintsha izinto ekujoliswe kuzo ezahlukeneyo (umz., i-aluminiyam, ubhedu, intsimbi engatyiwa, i-titanium, iithagethi ze-nickel, njl. njl.), iinkqubo ezahlukeneyo zefilimu (umz., i-superhard, i-wear-resistant, anti-corrosion alloy films, njl. njl.) ifunyenwe. Ngophuhliso lwamaxesha, izinto ezininzi ekujoliswe kuzo zivele kwintsapho enkulu njengamalungu amatsha ukwamkela iithagethi ze-titanium-aluminium alloy.
Ithagethi ye-titanium-aluminiyam ye-alloy yinjongo eyenziwe nge-titanium-aluminium alloy njengento ekrwada. Ngokubanzi isilivere-emhlophe, ineenzuzo zamandla aphezulu kunye nendawo ephezulu yokunyibilika. Ke yintoni uqheliselo lwethagethi ye-titanium aluminium alloy?
Ukuza kuthi ga ngoku, abavelisi abakhulu bamazwe ngamazwe baye bamkela ezi ndlela zimbini zokwenza iinjongo ze-titanium-aluminium alloy. Enye kukusebenzisa indlela yokuphosa ukwenza ingot, kwaye emva koko wenze itekeni ngexesha lenkqubo yokuphosa. Enye yenziwe nge-spray-formed titanium-aluminium alloy targets.
Indlela yokuphosa kunye nokuphosa edume ngale ndlela kukuba kwinkqubo yokuvelisa i-aluminium alloy sputtering targets, ngenxa yenkqubo ebalulekileyo yokongeza i-alloys rhoqo, ulwahlulo lwenzeka kwizinto ezijoliswe kuzo, kunye nomgangatho wefilimu efunyenwe yi-alloys. ukutshiza akukho phezulu. , ubuso bethagethi ye-sputtering buxhomekeke kwiincinci ezincinci, ezichaphazela ukufana kweempawu zefilimu. Ithagethi ye-titanium-aluminium alloy eveliswa yindlela yesibini yokwenza isitshizi inokuthintela le meko ingentla, kodwa iindleko zokwenziwa kwenjongo ziya kwandiswa kakhulu.
Ngokukodwa, xa usenza izinto ezinzima ukuphosa, kuyimfuneko ukusebenzisa i-jot et equaling pressure target, kwaye iindleko zonyuswa ngenxa yokusetyenziswa koxinzelelo olulinganayo olushushu.
Ukongeza kwezi zimbini iindlela zemveli zethagethi ze-titanium-aluminium alloy, indlela elula kwaye engabizi iyaziswa namhlanje. Ukwenziwa kweethagethi ze-titanium-aluminium alloy kunye nomgubo wokutshiza.
Ngezantsi, umhleli weBeijing Ruichi uya kukwabelana nawe ngendlela yokwenza i-titanium aluminium alloy target.
1. Umgaqo wokuqala
Umgaqo ophambili wale ndlela kukusebenzisa indlela ye-aerosol ukwenza umgubo we-raw material wethagethi kunye ne-alloy composition ratio. I-alloy powder iyahluzwa ukuze ifumane ubungakanani obufanelekileyo bomgubo. Umgubo ofunyenweyo ke usetyenziselwa ukucofa ivacuum eshushu ukwenza into ekujoliswe kuyo.
2. Inzuzo yokuqala
Inzuzo yale ndlela yokuvelisa kukuba inokuvelisa iithagethi ezahlukeneyo ze-aluminium alloy ezifana ne-aluminium kunye nechromium. I-aluminium, i-silicon, i-aluminium yobhedu, i-titanium, njl. Okwesibini, le ndlela inokuthintela ukuhlukana kwezinto eziphathekayo kunye neziphene ze-microparticle, okubangelwa ukuveliswa ngokukhawuleza kunye noqoqosho lweenjongo ze-titanium-aluminium alloy.
3. Inkqubo yokuphunyezwa
Inkqubo yokuphunyezwa echanekileyo yale ndlela kukubonelela kuqala ngezinto eziluhlaza zetsimbi zokwenza iinjongo ze-aluminium alloy. Ezi feedstocks zetsimbi ke zinyibilike kwisisombululo sentsimbi. Emva koko, isisombululo sesinyithi senziwe kwi-powder yensimbi nge-aerosol. Emva koko, i-powder target yensimbi yenziwe nge-vacuum hot pressing, kwaye igesi ye-inert isetyenziswe njengegesi yokukhusela.
Ixesha lokuposa: Apr-27-2022