Zeziphi iiMfuno zokuSebenza zeThagethi

Ithagethi inemarike ebanzi, indawo yesicelo kunye nophuhliso olukhulu kwixesha elizayo. Ukuze uncede ube nokuqonda okungcono imisebenzi ekujoliswe kuyo, apha ngezantsi injineli ye-RSM iya kwazisa ngokufutshane iimfuno eziphambili zokusebenza ekujoliswe kuzo.

Ubunyulu: ubunyulu sesinye sezibonakaliso eziphambili zokusebenza ekujoliswe kuzo, kuba ukucoceka kwethagethi kunempembelelo enkulu kumsebenzi wefilimu. Nangona kunjalo, kwisicelo esisebenzayo, iimfuno zokucoceka kwethagethi nazo zahlukile. Umzekelo, ngophuhliso olukhawulezayo lweshishini le-microelectronics, ubungakanani be-silicon wafer bandiswa ukusuka kwi-6 "ukuya kwi-8" ukuya kwi-12 ", kwaye ububanzi be-wiring buyancipha ukusuka kwi-0.5um ukuya kwi-0.25um, i-0.18um okanye i-0.13um. Ngaphambili, i-99.995% yokuhlanjululwa okujoliswe kuyo inokuhlangabezana neemfuno zenkqubo ye-0.35umic, ngelixa ukulungiswa kwemigca ye-0.18um kufuna i-99.999% okanye i-99.9999% yococeko olujoliswe kuyo.

Umxholo wokungcola: ukungcola kwizinto eziqinileyo ezijoliswe kuyo kunye neoksijini kunye nomphunga wamanzi kwi-pores yimithombo ephambili yokungcola kweefilimu ezifakwe. Iithagethi ngeenjongo ezahlukeneyo zineemfuno ezahlukeneyo zemixholo yokungcola eyahlukeneyo. Ngokomzekelo, iithagethi ze-aluminium ecocekileyo kunye ne-aluminium alloy esetyenziswa kwishishini le-semiconductor zineemfuno ezikhethekileyo zomxholo wesinyithi we-alkali kunye nomxholo we-radioactive element.

Uxinaniso: ukwenzela ukunciphisa ii-pores kwindawo eqinileyo kunye nokuphucula umsebenzi wefilimu ye-sputtering, injongo idla ngokufuneka ukuba ibe noxinzelelo oluphezulu. Ubuninzi benjongo ekujoliswe kuyo akuchaphazeli kuphela izinga lokutshiza, kodwa kuchaphazela imisebenzi yombane kunye ne-optical yefilimu. Ukuphakama koxinzelelo olujoliswe kuyo, ngcono umsebenzi wefilimu. Ukongezelela, ukuxinana kunye namandla ekujoliswe kuyo kuphuculwe ukwenzela ukuba ithagethi inokwamkela ngcono uxinzelelo lwe-thermal kwinkqubo yokutshiza. Uxinaniso lukwayenye yezalathi ezingundoqo zokusebenza koko kujoliswe kuko.