Okwangoku, kubavelisi behlabathi ekujoliswe kubo ngokutshiza, kukho iindlela ezimbini ezahlukeneyo zokwenziwa kwethagethi yokutshiza ye-aluminiyam. Enye kukukhetha indlela yokuphosa yokwenza ingot, kwaye emva koko wenze inkqubo yokuphosa. Enye yenziwe ngokubumba i-spray.Vumela i-Beijing umhleli wenze ukuba wabelane, malunga nenkqubo yokuvelisa i-titanium aluminium alloy target yintoni ingqiqo.
Ngokubhekiselele kwindlela eyaziwayo yokuphosa / yokuphosa, xa kusenziwa i-aluminium alloy sputtering target, i-aluminium alloy sputtering target isoloko ixhomekeke kulwahlulo ngenxa yokongezwa kwezinto ze-alloy, okukhokelela kumgangatho ombi wefilimu echithekileyo, kunye namasuntswana amancinci. kulula ukwenzeka kumphezulu wethagethi yokutshiza, nto leyo eya kuchaphazela ukufana kweempawu zefilimu; nangona kunjalo, ukuba isitshizi esaziwayo siyabumba. indlela isetyenziselwa ukuvelisa i-aluminium ialloy sputtering target, nangona iziphene ezikhankanywe ngasentla zinokuthintelwa, iindleko zokwenziwa kwethagethi ye-sputtering ziya kuphuculwa kakhulu, ngakumbi xa kusenziwa ezinye iithagethi ze-sputtering ezingelula ukuphoswa kwaye kufuneka zibe. icinezelwe ngokushushu, iindleko ziya kuphuculwa ngokusebenzisa i-hot pressing.
Ukuze wenze inkqubo yokwenziwa kwethagethi ye-titanium aluminium alloy ilula kwaye iphantsi kwexabiso eliphantsi, indlela yokuvelisa i-aluminium alloy sputtering target kunye ne-air spray powder ifakwe apha. Umgaqo wayo ubhekiselele kwinto yokuba umgubo wezinto ezijoliswe kuzo wenziwe ngendlela yokutshiza yomoya ngokwe-alloy composition ratio, emva koko i-alloy powder ihlolwe ukuze ifumane ubungakanani obufanelekileyo be-powder particle. Okokugqibela, umgubo ucinezelekile ukuba wenze i-aluminium alloy sputtering target.
Le ndlela yokuvelisa iithagethi ze-aluminiyam ye-aluminiyam yokutshiza ngomgubo wokutshiza emoyeni ingasetyenziselwa ukwenza iithagethi ezahlukeneyo ze-aluminiyam ye-alloy splash (i-aluminium chromium, i-aluminiyam i-silicon yobhedu, i-titanium ye-aluminiyam, njl.). Amanyathelo okuphumeza akhethwayo ngala: ukubonelela ngemathiriyeli yentsimbi zokwenza iithagethi ze-aluminiyam ye-alloy yokutshiza nokuzinyibilikisa zibe yinyibilika yesinyithi; Ekugqibeleni, umgubo wesinyithi wenziwa ngokucofa okutshisayo kwevacuum ukwenza i-aluminium alloy sputtering target, kunye negesi engasebenziyo iqaliswa njengegesi yolondolozo. Le ndlela inokuthintela ulwahlulo lwedatha kunye neziphene ezincinci zamasuntswana, kwaye ivelise iithagethi ezikumgangatho ophezulu wokutshiza ngokukhawuleza nangexabiso eliphantsi.
Ixesha lokuposa: Jun-01-2022