Ithagethi ye-titanium alloy kunye ne-titanium yesinyithi yenziwe nge-titanium, ngoko ke ulwazi luphantse lufane, kodwa umahluko phakathi kwezi zibini ikakhulu ulele kwithagethi ye-sputtering ye-titanium alloy eyenziwe ngesinyithi se-titanium ngeendlela ezininzi, kwaye i-titanium yenzeka kwindalo njengesixhobo. Ithagethi ye-titanium alloy inokusetyenziswa ngokubanzi kwiindidi ezininzi zomsebenzi, ngoku umbhali we-Beijing richmat isishwankathelo eziliqela eziqhelekileyo titanium ingxubevange ekujoliswe ngokwemigaqo yokusetyenziswa kwemeko ukusinika intshayelelo eneenkcukacha.
一、Ti iithagethi zeesekethe ezihlanganisiweyo
Iimfuno ze-sputtering titanium alloy targets zihluke phakathi kweesekethe ezingadibanisiweyo kunye neesekethe ezidibeneyo. Ngokuqhelekileyo, iisekethe ezihlanganisiweyo zineemfuno eziphezulu zokugubungela idatha, njengokucoceka okuphezulu, ubungakanani beengqolowa ezincinci kunye nokuchaneka kwemilinganiselo echanekileyo.Ukucoceka kweethagethi ze-titanium kwiisekethe ezihlanganisiweyo kukhulu kune-99.995%, ephezulu kuneyo isetyenziswe kwi-non-integrated. iisekethe, ebonisa ukuba ukusetyenziswa ezahlukeneyo iimfuno ekujoliswe titanium zahluke kakhulu.
二、Ti ithagethi yomboniso wephaneli ecaba
Iithagethi ze-Titanium alloy ezisetyenziswa kwimiboniso yephaneli ecaba ziquka umboniso wekristale elulwelo, umboniso weplasma, umboniso we-electroluminescence kunye nomboniso okhutshwayo endle. Ifilimu ebhityileyo yomboniso osicaba igutyungelwe ukwenza indlela, iAl, iCu, iTi kunye neMo zezona zinjongo zokutshiza zentsimbi kwiphaneli ecaba. izibonisi
三、Ti iithagethi zezinto zokuhombisa
Ucoceko oluphezulu lwe-titanium alloy target material lunokumelana ne-corrosion yomoya, ukusetyenziswa kwexesha elide emoyeni akutshintshi umbala, ukuqinisekisa ukuba umbala wokuqala we-titanium kunye noqhagamshelwano lomntu alulo kunye nezinye iimpawu ezibalaseleyo. Ngoko ke, i-titanium yokucoceka okuphezulu ingasetyenziselwa njengezinto zokuhombisa, kwiminyaka yamuva nje, ezifana nezacholo, iiwotshi kunye neeglasi kunye nezinye izihombiso ezinobunyulu be-titanium zifikelele kwinqanaba le-5N.
四, iithagethi zeTi zeenkqubo zokumpompa ngesifunxa esiphakamileyo
Njengesinyithi esisebenza ngamachiza, i-titanium inokusabela ngezinto ezininzi kunye neekhompawundi kwiqondo lokushisa eliphezulu. Ithagethi ye-titanium alloy yokucoceka ephezulu inomthamo oqinileyo we-adsorption yeegesi ezisebenzayo (ezifana ne-O2, N2, CO, CO2, umphunga wamanzi ngaphezu kwe-650 ° C), kunye nefilimu ye-Ti ephuphumayo eludongeni lwempompo inokwenza umphezulu kunye nokusebenza okuphezulu kwe-adsorption. . Le propati yenza i-Ti isetyenziswe ngokubanzi njenge-getter kwi-ultra-high vacuum extraction system.Ukuba isetyenziselwa ukuphucula ipompo, ipompo ye-sputtering ion, njl., inokwenza uxinzelelo lokugqibela lokusebenza kwepompo ye-sputtering ion iphantsi njenge-10-9PA.
Ixesha lokuposa: Apr-25-2022