ImiQathango yeeThagethi zeAlloy

1, Ukulungiselela ukutshiza

Kubaluleke kakhulu ukugcina igumbi le-vacuum, ngakumbi inkqubo yokutshiza icocekile. Nayiphi na intsalela eyenziwe ngeoli yokuthambisa, uthuli kunye nokwaleka kwangaphambili kuya kuqokelela umphunga wamanzi kunye nezinye izinto ezingcolisayo, eziya kuchaphazela ngokuthe ngqo iqondo le-vacuum kunye nokwandisa amathuba okuhluleka ukwenza ifilimu. Isiphaluka esifutshane okanye i-arcing ejoliswe kuyo, ifilimu engcolileyo kunye nomxholo ogqithiseleyo wokungcola kweekhemikhali zihlala zibangelwa yi-sputtering room engacocekanga, i-sputtering gun kunye nethagethi. Ukuze uhambelane neempawu zokubunjwa kwengubo, kuyimfuneko ukucoca kunye nokomisa igesi yokutshiza (i-argon okanye i-oxygen). Emva kokuba i-substrate ifakwe kwi-sputtering room, umoya kufuneka ukhutshwe ukuze ufikelele kwi-vacuum efunwa yinkqubo. Isigqubuthelo esikhuselayo kwindawo emnyama, udonga lomgodi kunye nomphezulu omeleneyo nawo kufuneka ugcinwe ucocekile. Xa ucoca igumbi lokucoca, sikhuthaza ukusebenzisa iglasi yokudutyulwa kwebhola yokuqhushumba ukunyanga iindawo ezinothuli, kunye nomoya oxinzelelweyo ukususa iintsalela zokutshiza kwangoko kwigumbi, kwaye emva koko ngokuzolileyo upholise umphezulu wangaphandle ngesanti efakwe i-alumina. Emva kokupholisa iphepha le-gauze, licocwa ngotywala, i-acetone kunye namanzi adibeneyo. Ngokudibeneyo, ikhuthaza ukusetyenziswa kwesicoci se-industrial vacuum ukucoca okuncedisayo. Iithagethi eziveliswe yintsimbi yeGaozhan zipakishwe kwiingxowa zeplastiki ezivaliweyo,

Yakhelwe kwiarhente yobungqina bokufuma. Xa usebenzisa ithagethi, nceda ungachukumisi itekeni ngqo ngesandla sakho. Qaphela: xa usebenzisa i-target, nceda unxibe iiglavu zokulungisa ezicocekileyo kunye ne-lint. Ungaze uchukumise into ekujoliswe kuyo ngqo ngezandla zakho

2, Ukucoca ekujoliswe kuko

Injongo yokucoca ekujoliswe kuyo kukususa uthuli okanye ukungcola okunokuthi kubekho phezu kwendawo ekujoliswe kuyo.

Ithagethi yentsimbi inokucocwa ngamanyathelo amane,

Inyathelo lokuqala kukucoca ngelaphu elithambileyo lasimahla elifakwe kwi-acetone;

Isinyathelo sesibini sifana nesinyathelo sokuqala, ukucoca ngotywala;

Inyathelo lesi-3: coca ngamanzi adityanisiweyo. Emva kokuhlamba ngamanzi adibeneyo, faka i-target e-oven kwaye uyomise kwi-100 ℃ imizuzu engama-30.

Ukucocwa kwe-oxide kunye neethagethi ze-ceramic ziya kwenziwa "nge-lint free cloth".

Isinyathelo sesine kukuhlamba ithagethi nge-argon ngoxinzelelo oluphezulu kunye negesi yamanzi aphantsi emva kokususa indawo enothuli, ukuze kususwe zonke iinqununu ezingcolileyo ezinokuthi zenze i-arc kwinkqubo yokutshiza.

3. Isixhobo ekujoliswe kuso

Kwinkqubo yofakelo ekujoliswe kulo, i-Z imigqaliselo ebalulekileyo kukuqinisekisa uxhulumaniso olulungileyo lwe-thermal conduction phakathi kwethagethi kunye nodonga lokupholisa lompu we-sputtering. Ukuba i-warpage ye-stave yokupholisa inzima okanye i-warpage yepleyiti yangasemva inzima, isixhobo esijoliswe kuyo siya kuqhekeka okanye sigobe, kwaye ukuhanjiswa kwe-thermal ukusuka kwithagethi yangasemva ukuya kwithagethi kuya kuchaphazeleka kakhulu, kubangele ukusilela kokutshabalalisa ubushushu. kwinkqubo yokutshiza, kwaye ekujoliswe kuyo kuya kuqhekeka okanye kuphoswe

Ukuze kuqinisekiswe ukuqhutyelwa kwe-thermal, uluhlu lwephepha legraphite linokuthi lifakwe phakathi kodonga lokupholisa i-cathode kunye nethagethi. Nceda unikele ingqalelo ukuba uhlolisise ngenyameko kwaye wenze kucace ukucaca kodonga lokupholisa umpu wokutshiza osetyenziswayo ukuqinisekisa ukuba i-O-ring isoloko ikhona.

Ekubeni ukucoceka kwamanzi okupholisa asetyenzisiweyo kunye nothuli olunokuthi lwenzeke ngexesha lokusebenza kwezixhobo luya kufakwa kwi-tank yamanzi okupholisa i-cathode, kuyimfuneko ukujonga nokucoca itanki yamanzi okupholisa i-cathode xa ufaka i-target ukuqinisekisa ukuguquguquka. ukujikeleziswa kwamanzi okupholisa nokuba indawo yokungena nokuphumayo ayisayi kuvalelwa.

Ezinye ii-cathodes zicetywa ukuba zibe nesithuba esincinci kunye ne-anode, ngoko ke xa ufaka i-target, kuyafuneka ukuba kuqinisekiswe ukuba akukho mnxeba okanye umqhubi phakathi kwe-cathode kunye ne-anode, ngaphandle koko kuya kwenzeka isiphaluka esifutshane.

Jonga kwiManuwali yomqhubi wesixhobo ngolwazi malunga nendlela yokusebenzisa ithagethi ngokuchanekileyo. Ukuba akukho lwazi olunjalo kwincwadi yomsebenzisi, nceda uzame ukufaka isixhobo ngokweengcebiso ezifanelekileyo ezinikezwe yi-Gaozhan metal. Xa uqinisa into ekujoliswe kuyo, qala uqinise ibholithi enye ngesandla, uze uqinise enye ibholithi kwidiagonal ngesandla. Phinda oku de zonke iibholiti kwisixhobo ziqiniswe, kwaye emva koko uqinise ngento ethile.

I-4, isiphaluka esifutshane kunye nokuhlolwa kokuqina

Emva kokugqitywa kwesixhobo esijoliswe kuyo, kuyafuneka ukuba kujongwe isiphaluka esifutshane kunye nokuqina kwayo yonke i-cathode,

Kucetywayo ukugqiba ukuba kukho isiphaluka esifutshane kwi-cathode ngokusebenzisa imitha yokumelana

Ucalucalulo olumqolo. Emva kokuqinisekisa ukuba akukho mjikelezo omfutshane kwi-cathode, ukufumanisa ukuvuza kunokuqhutyelwa, kwaye amanzi angangeniswa kwi-cathode ukuqinisekisa ukuba kukho ukuvuza kwamanzi.

5, Ujoliso lokutshiza kwangaphambili

Ukuchaphaza okujoliswe kuko kuthethelela ukugafaza okucocekileyo kwe-argon, okunokucoca umphezulu wethagethi. Xa ithagethi ihlaziywa kwangaphambili, kukhuthazwa ukuba kunyuswe ngokucotha amandla okutshiza, kunye nesantya sokunyuka kwamandla kwithagethi ye-ceramic yi-1.5WH / cm2. Isantya sangaphambili sokutshiza sethagethi yesinyithi sinokuba phezulu kunebhloko yethagethi yeceramic, kwaye isantya sokunyuka kwamandla esifanelekileyo yi-1.5WH / cm2.

Kwinkqubo yokutshiza kwangaphambili, kufuneka sijonge i-arcing yethagethi. Ixesha langaphambi kokutshiza lidla ngokuba yimizuzu eli-10. Ukuba akukho nto ye-arcing, qhubeka ukwandisa amandla okutshiza

Kumandla amiselweyo. Ngokutsho amava, eyamkelekileyo Z eliphezulu sputtering amandla ekujoliswe metal yi

25watts / cm2, 10watts / cm2 kwithagethi yeceramic. Nceda ujonge isiseko kunye namava oxinzelelo lwegumbi le-vacuum ngexesha lokutshiza kwincwadi yokusebenza yenkqubo yomsebenzisi. Ngokuqhelekileyo, kufuneka kuqinisekiswe ukuba ubushushu bamanzi kwindawo yokuphuma kwamanzi okupholisa kufuneka bube ngaphantsi kwe-35 ℃, kodwa i-Z kubalulekile ukuqinisekisa ukuba inkqubo yokujikeleza kwamanzi okupholisa inokusebenza ngokufanelekileyo.

Ukujikeleza ngokukhawuleza kwamanzi angaphezulu kwe-supercooling kuthatha ukushisa, okusisiqinisekiso esibalulekileyo sokuqinisekisa ukutshiza okuqhubekayo ngamandla amakhulu. Kwiithagethi zetsimbi, ngokuqhelekileyo kukhuthazwa ukuba ukuhamba kwamanzi okupholisa

Uxinzelelo lwamanzi lwe-20lpm malunga ne-5gmp; Kwiithagethi ze-ceramic, ngokuqhelekileyo kukhuthazwa ukuba ukuhamba kwamanzi yi-30lpm kunye noxinzelelo lwamanzi malunga ne-9gmp.

6, Ugcino ekujoliswe kulo

Ukuthintela ukujikeleza okufutshane kunye ne-arcing ebangelwa ngumgodi ongacocekanga kwinkqubo yokutshiza, kuyimfuneko ukususa i-sputter eqokelelwe embindini kunye namacala omabini omzila wokutshiza ngezigaba,

Oku kwakhona kunceda abasebenzisi ukuba ngokuqhubekayo sputter at z uxinano lwamandla aphezulu

7, Ugcino ekujoliswe kulo

Iithagethi ezibonelelwe ngentsimbi yeGaozhan zipakishwe kwiingxowa zeplastiki ezifunxa kabini. Sikhuthaza ukuba abasebenzisi bagcine iithagethi, nokuba yintsimbi okanye i-ceramic, kwipakethe yevacuum. Ngokukodwa, iithagethi zokubambisana kufuneka zigcinwe phantsi kweemeko ze-vacuum ukukhusela i-oxidation ye-bonding layer ekuchaphazela umgangatho wokudibanisa. Ngokumalunga nokupakishwa kweethagethi zentsimbi, sikhuthaza ukuba i-Z ifakwe kwiingxowa zeplastiki ezicocekileyo.