Abasebenzisi abaninzi kufuneka ukuba bevile ngemveliso yethagethi yokutshiza, kodwa umthetho-siseko wokutshiza ekujoliswe kuwo kufuneka ube ungaqhelekanga. Ngoku, umhleli weIzinto eziTyebileyo eziZodwa (RSM) wabelana ngemigaqo yemagnetron yokugalela ekujoliswe kuyo.
Intsimi yemagnethi ye-orthogonal kunye nentsimi yombane yongezwa phakathi kwe-electrode ekujoliswe kuyo (i-cathode) kunye ne-anode, igesi ye-inert efunekayo (ngokubanzi i-Ar gas) izaliswe kwigumbi eliphezulu le-vacuum, imagnethi esisigxina yenza i-250 ~ 350 intsimi yemagnethi yeGauss umphezulu wedatha ekujoliswe kuyo, kunye nentsimi ye-orthogonal ye-electromagnetic yenziwe nge-high-voltage yombane.
Ngaphantsi kwefuthe lentsimi yombane, i-Ar gas i-ionized ibe yi-ion kunye nee-electron. Umbane othile ongalunganga ophezulu wongezwa kwindawo ekujoliswe kuyo. Impembelelo yamandla kazibuthe kwii-electron ezikhutshwe kwipali ekujoliswe kuyo kunye namathuba e-ionization yokwanda kwegesi yokusebenza, okwenza i-plasma ephezulu kufuphi ne-cathode. Ngaphantsi kwempembelelo ye-Lorentz force, i-Ar ions ikhawuleza ukuya kwindawo ekujoliswe kuyo kwaye ibhobhoze indawo ekujoliswe kuyo ngesantya esiphezulu kakhulu, ii-athomu ezichithakeleyo kwindawo ekujoliswe kuyo zilandela umgaqo wokuguqulwa kwesantya kwaye zibhabhe zimke kwindawo ekujoliswe kuyo ukuya kwi-substrate enamandla amakhulu e-kinetic. ukufaka iifilimu.
I-Magnetron sputtering yohlulwe ngokubanzi ibe ziindidi ezimbini: i-Tributary sputtering kunye ne-RF sputtering. Umgaqo-siseko wezixhobo zokutshiza i-tributary sputtering ulula, kwaye isantya saso sikwakhawuleza xa kutshiza isinyithi. I-RF sputtering isetyenziswa ngokubanzi. Ukongeza kwizixhobo zokuqhuba, iyakwazi ukutshiza izinto ezingaqhubekiyo. Kwangaxeshanye, iphinda iqhube i-sputtering esebenzayo ukulungiselela izixhobo ze-oxides, i-nitrides, i-carbides kunye nezinye iikhompawundi. Ukuba i-RF frequency yonyusiwe, iya kuba yi-microwave sputtering yeplasma. Ngoku, i-electron cyclotron resonance (ECR) i-microwave plasma sputtering iqhele ukusetyenziswa.
Ixesha lokuposa: May-31-2022