Abanye abathengi babuze malunga nokujoliswa kwe-silicon. Ngoku, oogxa abavela kwiSebe leTekhnoloji yeRSM baya kukuhlalutya iithagethi ze-silicon sputtering kuwe.
Ithagethi ye-Silicon sputtering yenziwe ngokufafaza isinyithi ukusuka kwi-silicon ingot. Ithagethi inokuveliswa ngeenkqubo ezahlukeneyo kunye neendlela, kubandakanya i-electroplating, i-sputtering kunye nokubekwa komphunga. I-embodiments ekhethwayo ngakumbi ibonelela ngeenkqubo ezongezelelweyo zokucoca kunye ne-etching ukufezekisa iimeko ezinqwenelekayo zomphezulu. Ithagethi eveliswayo ibonakalisa kakhulu, kunye noburhabaxa obungaphantsi kwama-angstroms angama-500 kunye nesantya esikhawulezayo sokutshisa. Ifilimu elungiselelwe yithagethi ye-silicon inenani eliphantsi le-particle.
Ithagethi ye-Silicon sputtering isetyenziselwa ukufaka iifilimu ezincinci kwizinto ezisekelwe kwi-silicon. Ngokuqhelekileyo zisetyenziselwa ukubonisa, i-semiconductor, i-optical, i-optical communication kunye ne-glass coating applications. Zikwafanelekele ukukrola amacandelo obuchwepheshe obuphezulu. Iithagethi zeSilicon zohlobo lwe-N zingasetyenziselwa iinjongo ezahlukeneyo. Isebenza kwiinkalo ezininzi, kubandakanywa i-electronics, iiseli zelanga, i-semiconductors kunye neziboniso.
Ithagethi ye-silicon sputtering sisixhobo sokugalela esisetyenziselwa ukubeka imathiriyeli kumphezulu. Ngokuqhelekileyo, iqulethe iiathom ze-silicon. Inkqubo yokutshiza ifuna isixa esichanekileyo semathiriyeli, enokuba ngumngeni omkhulu. Ukusebenzisa izixhobo ezifanelekileyo zokutshiza kuphela kwendlela yokwenza izinto ezisekwe kwisilicon. Kuyaphawuleka ukuba ithagethi yokutshiza yesilicon ayisetyenziswanga kwinkqubo yokutshiza.
Ixesha lokuposa: Oct-24-2022