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Ukudala ipateni yedayimane ye-polycrystalline usebenzisa i-FeCoB etchant enzima

Uphononongo olutsha kwijenali yeDayimane kunye neZixhobo eziNxulumene nazo zijolise ekuhonjisweni kwedayimani yepolycrystalline ngeFeCoB etchant ukwenza iipateni. Ngenxa yolu tshintsho luphuculweyo lweteknoloji, umphezulu wedayimani unokufumaneka ngaphandle komonakalo kunye neziphene ezimbalwa.
UPhando: Ukuchongwa kwe-Spatial ekhethiweyo yedayimani kwindawo eqinileyo kusetyenziswa i-FeCoB enepateni yefotolithographic. Umfanekiso wekhredithi: Bjorn Wilezic/Shutterstock.com
Ngokusebenzisa inkqubo yokusabalalisa i-solid-state, iifilimu ze-FeCoB nanocrystalline (i-Fe: Co: B = 60: 20: 20, umlinganiselo we-athomu) inokufezekisa ukujoliswa kwe-lattice kunye nokupheliswa kweedayimani kwi-microstructure.
Iidayimani zineempawu ezizodwa ze-biochemical kunye nembonakalo, kunye nokunwebeka okuphezulu kunye namandla. Ukuqina kwayo okugqithisileyo kungumthombo obalulekileyo wenkqubela phambili kwi-ultra precision machining (i-diamond yokuguqula iteknoloji) kunye nendlela eya kwiingcinezelo ezigqithiseleyo kuluhlu lwamakhulu e-GPa.
Ukunganyangeki kweekhemikhali, ukuqina okubonakalayo kunye nomsebenzi webhayoloji wonyusa amathuba oyilo lweenkqubo ezisebenzisa ezi mpawu zisebenzayo. Idayimane izenzele igama kwiinkalo ze-mechatronics, optics, sensors kunye nolawulo lwedatha.
Ukwenzela ukuba ukusetyenziswa kwazo kube lula, ukudityaniswa kwedayimani kunye nepateni yazo kudala iingxaki ezicacileyo. I-reactive ion etching (RIE), i-plasma edityanisiweyo nge-inductively (ICP), kunye ne-electron beam induced etching yimizekelo yeenkqubo ezikhoyo zenkqubo ezisebenzisa iindlela zokudibanisa (EBIE).
Izakhiwo zedayimani nazo zenziwe ngokusebenzisa i-laser kunye ne-ioning beam (FIB) yobuchule bokucwangcisa. Injongo yobu buchule bokwenziwa kukukhawulezisa ukuchithwa kunye nokuvumela ukunyuswa kwiindawo ezinkulu kwizakhiwo zemveliso ezilandelelanayo. Ezi nkqubo zisebenzisa i-etchants yolwelo (i-plasma, iigesi, kunye nezisombululo zolwelo), ezithintela ukuntsonkotha kwejometri okufikelelekayo.
Lo msebenzi uphantsi wophononongo lokukhutshwa kwezinto ngokuvelisa umphunga wekhemikhali kwaye udala idayimani ye-polycrystalline ene-FeCoB (Fe:Co:B, 60:20:20 ipesenti ye-atomic) kumphezulu. Ingqwalasela ephambili ihlawulwe ekudalweni kweemodeli ze-TM ze-etching echanekileyo yezakhiwo zemitha-scale kwiidayimani. Idayimani engaphantsi ibophelelwe kwi-nanocrystalline FeCoB ngonyango lokushisa kwi-700 ukuya kwi-900 ° C kwi-30 ukuya kwi-90 imizuzu.
Umaleko ococekileyo wesampulu yedayimani ubonisa i-polycrystalline microstructure engaphantsi. Uburhabaxa (Ra) ngaphakathi kwesuntswana ngalinye laliyi-3.84 ± 0.47 nm, kwaye uburhabaxa bubonke bobuso babuyi-9.6 ± 1.2 nm. Uburhabaxa (ngaphakathi kwenkozo yedayimane enye) yomaleko wesinyithi omiliselweyo we-FeCoB yi-3.39 ± 0.26 nm, kwaye ubude bomaleko yi-100 ± 10 nm.
Emva kokuba i-annealing kwi-800 ° C ye-30 min, ubukhulu bentsimbi yentsimbi bunyuke ukuya kwi-600 ± 100 nm, kunye nobukhulu bomhlaba (Ra) bunyuke ukuya kwi-224 ± 22 nm. Ngexesha le-annealing, ii-athomu zekhabhoni zisasazeka kwi-FeCoB layer, ekhokelela ekwandeni kobukhulu.
Iisampulu ezintathu ezineengqimba ze-FeCoB ze-100 nm ubukhulu zifudunyezwe kumaqondo okushisa angama-700, 800, kunye ne-900 ° C, ngokulandelanayo. Xa uluhlu lweqondo lokushisa lungaphantsi kwe-700 ° C, akukho kudibanisa okubalulekileyo phakathi kwedayimane kunye ne-FeCoB, kwaye izinto ezincinci kakhulu zisuswe emva kokunyangwa kwe-hydrothermal. Ukususwa kwezinto kuphuculwe ukuya kumaqondo obushushu angaphezu kwama-800 °C.
Xa iqondo lobushushu lifikelela kuma-900°C, izinga lokuncipha linyuke kabini xa lithelekiswa neqondo lobushushu le-800°C. Nangona kunjalo, iprofayili yommandla ochongiweyo yahluke kakhulu kuleyo yolandelelwano lwe-etch emiliselweyo (FeCoB).
I-Schematic ebonisa umbono we-etchant yesimo esiluqilima ukwenza ipateni: Ukukhethwa kwendawo eqinileyo yedayimani kusetyenziswa i-FeCoB efotwe ngokwefotografi. Ikhredithi yomfanekiso: uVan Z. kunye noShankar MR et al., Iidayimani kunye nezinto eziNxulumene nazo.
Iisampuli ze-FeCoB ze-100 nm ubukhulu kwiidayimani zicutshungulwe kwi-800 ° C kwi-30, i-60, kunye ne-90 imizuzu, ngokulandelanayo.
I-roughness (Ra) yendawo eqingqiweyo inqunywe njengomsebenzi wexesha lokuphendula kwi-800 ° C. Ukuqina kweesampulu emva kokuxutywa kwemizuzu engama-30, 60 kunye ne-90 yayiyi-186±28 nm, 203±26 nm kunye ne-212±30 nm, ngokulandelanayo. Ngobunzulu be-etch ye-500, i-800, okanye i-100 nm, umlinganiselo (RD) woburhabaxa bendawo ekroliweyo ukuya kubunzulu be-etch yi-0.372, 0.254, kunye ne-0.212, ngokulandelanayo.
Uburhabaxa bendawo echongiweyo abunyuki kakhulu ngokunyusa ubunzulu be-etching. Kufunyaniswe ukuba ubushushu obufunekayo kwimpendulo phakathi kwedayimani kunye ne-HM etchant bungaphezulu kwe-700°C.
Iziphumo zophononongo zibonisa ukuba i-FeCoB inokususa ngempumelelo idayimani ngesantya esikhawulezayo kunokuba yiFe okanye i-Co yodwa.
    


Ixesha lokuposa: Aug-31-2023