Ukuqhekeka kwiithagethi ze-sputtering ngokuqhelekileyo kwenzeka kwiithagethi ze-ceramic sputtering ezifana ne-oxides, i-carbides, i-nitrides, kunye nezixhobo ezinqabileyo ezifana ne-chromium, i-antimony, i-bismuth. Ngoku makhe iingcali zobugcisa be-RSM zichaze ukuba kutheni i-sputtering target crack kwaye ngawaphi amanyathelo okuthintela anokuthathwa ukuphepha le meko.
Iithagethi zeCeramic okanye izinto ezinqabileyo zihlala zinoxinzelelo lwendalo. Olu xinzelelo lwangaphakathi lwenziwa kwinkqubo yokwenziwa kwethagethi. Ukongeza, olu xinzelelo alupheliswanga ngokupheleleyo yinkqubo yokukhupha, kuba ziimpawu zendalo zezi zixhobo. Kwinkqubo yokutshiza, ibhombu yee-ion zegesi idlulisela amandla azo kwii-athom ekujoliswe kuzo, ibanika amandla aneleyo okuzahlula kwilathisi. Olu tshintshelo lwesantya sobushushu lwenza ubushushu obujoliswe kuko bunyuke, obunokufikelela kwi-1000000 ℃ kwinqanaba leathom.
Ezi zothuso ezishushu zonyusa uxinzelelo lwangaphakathi olukhoyo kwithagethi ngamaxesha amaninzi. Kule meko, ukuba ubushushu abuchithwanga ngokufanelekileyo, ithagethi inokuphuka. Ukuze uthintele ekujoliswe kuyo ekuqhekekeni, ukutshatyalaliswa kobushushu kufuneka kugxininiswe. Indlela yokupholisa amanzi iyafuneka ukususa amandla obushushu angafunekiyo koko kujoliswe kuko. Omnye umba omawuqwalaselwe kukwanda kwamandla. Amandla amaninzi asetyenziswe ngexesha elifutshane nawo aya kubangela ukothuka kwe-thermal kwithagethi. Ukongezelela, siphakamisa ukubopha ezi thagethi kwi-backplane, engakwaziyo ukubonelela ngenkxaso ekujoliswe kuyo, kodwa iphinde ikhuthaze ukutshintshwa kobushushu obungcono phakathi kokujoliswe kuyo kunye namanzi. Ukuba ithagethi ineentanda kodwa idityaniswe neplate yangasemva, isenokusetyenziswa.
I-Rich Special Materials Co., Ltd. inokubonelela ngeethagethi ze-sputtering nge-backplane. Ingenziwa ngokwezifiso ngokweemfuno zabathengi bezinto eziphathekayo, ubukhulu kunye nohlobo lokudibanisa.
Ixesha lokuposa: Sep-21-2022