Ihoseyili yeFeCoTa Sputtering Ithagethi ePhezulu Ucoceko oluPhezulu oluNcinci oluNcinci lweFilimu yePvd yoKutyabeka ngokweSiko elenziwe uMvelisi kunye noMboneleli

Iron Cobalt Tantalum

I-FeCoTa Sputtering Ithagethi ePhezulu Ukucoceka okuphezulu kweFilimu encinci yePvd Ukugquma ngokweSiko oFanekisiweyo

Inkcazelo emfutshane:

Udidi	I-alloy Sputtering Target
Ifomula yeMichiza	FeCoTa
Ukuqamba	Iron Cobalt Tantalum
Ubunyulu	99.9%, 99.95%, 99.99%
Ubume	Iipleyiti, iiKholamu ekuJoliswe kuzo, ii-arc cathodes, ezenzelwe wena
Inkqubo yeMveliso	Ukunyibilika kweVacuum, PM
Ubungakanani obukhoyo	L≤200mm,W≤200mm

Thumela i-imeyile kuthi

Iinkcukacha zeMveliso

Iithegi zeMveliso

Iithagethi ze-Iron Cobalt Tantalum zihlala zifumaneka ngokwesangqa kunye nezixhobo zefilimu ezicekethekileyo ezithe nkqo kwimidiya yokurekhoda. Ubungakanani obukhulu beTantalum ekhoyo kwi-alloy iya kubangela ukuhlukana kunye nokunikezela ngamasuntswana anganyibilikiyo. Sisebenzisa indlela yokuvelisa ekhethekileyo enokuqinisekisa i-homogeneity ye-microstructure kunye nokuphucula iimpawu zomatshini zezixhobo.

Igama lemveliso		FeCoTa
Fe/wt%		Ibhalansi	Ibhalansi	Ibhalansi
Co/wt%		21.6±0.5	21.9±0.5	20.2±0.5
Ta/wt%		41.1±0.8	39.4±0.8	44.3±0.8
Umxholo wokungcola kwesinyithi(ppm)	Ni	≤100	≤100	≤100
	Al	≤300	≤300	≤300
	Si	≤200	≤200	≤200
Umxholo wokungcola kwegesi(ppm)	C	≤200	≤200	≤200
	N	≤100	≤100	≤100
	O	≤600	≤600	≤600
	S	≤75	≤75	≤75

Izinto eziTyebileyo eziZodwa zisebenza ngokukhethekileyo kuMveliso weThagethi yokuSputtering kwaye inokuvelisa i-Iron Cobalt Tantalum Sputtering Materials ngokwemigaqo yabaThengi. Ukuze ufumane inkcazelo engakumbi, nceda uqhagamshelane nathi.

Ngaphambili: I-FeCo Sputtering Ithagethi ePhakamileyo Ukusulungeka kweFilimu yePvd eNcinciweyo eyenziwe ngokweSiko

Okulandelayo: I-FeSi Sputtering Ithagethi ePhakamileyo Ukusulungeka kweFilimu yePvd eNcinciweyo eyenziwe ngokweSiko