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Top Quality Crucible Liners - Tungsten Silicide – Rich

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With our excellent management, strong technical capability and strict quality control system, we continue to provide our clients with reliable quality, reasonable prices and excellent services. We aim at becoming one of your most reliable partners and earning your satisfaction for In Sputtering Target , Evaporative Crucible Material , Conicrmo Sputtering Target , We welcome new and previous clients from all walks of lifetime to get in touch with us for future small business interactions and mutual success!
Top Quality Crucible Liners - Tungsten Silicide – Rich Detail:

Tungsten silicide WSi2 is used as an electric shock material in microelectronics, shunting on polysilicon wires, anti-oxidation coating and resistance wire coating. Tungsten silicide is used as a contact material in microelectronics, with a resistivity of 60-80μΩcm. It is formed at 1000°C. It is usually used as a shunt for polysilicon lines to increase its conductivity and increase signal speed. The tungsten Silicide layer can be prepared by chemical vapor deposition, such as vapor deposition. Use monosilane or dichlorosilane and tungsten hexafluoride as raw material gas. The deposited film is non-stoichiometric and requires annealing to be transformed into a more conductive stoichiometric form.

Tungsten silicide can replace the earlier tungsten film. Tungsten silicide is also used as a barrier layer between silicon and other metals.

Tungsten silicide is also very valuable in microelectromechanical systems, among which tungsten silicide is mainly used as a thin film for manufacturing microcircuits. For this purpose, the tungsten silicide film can be plasma-etched using, for example, silicide.

ITEM Chemical composition
Element W C P Fe S Si
Content(wt%) 76.22 0.01 0.001 0.12 0.004 Balance

Rich Special Materials specializes in the Manufacture of Sputtering Target and could produce Tungsten Silicide Sputtering Materials according to Customers’ specifications. For more information, please contact us.


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Every member from our high efficiency sales team values customers' needs and business communication for Top Quality Crucible Liners - Tungsten Silicide – Rich , The product will supply to all over the world, such as: Turin, Gambia, Brazil, We have more than 100 works in the plant, and we also have a 15 guys work team to service our customers for before and after sales. Good quality is the key factor for the company to stand out from other competitors. Seeing is Believing, want more information? Just trial on its products!
  • We are long-term partners, there is no disappointment every time, we hope to maintain this friendship later!
    5 Stars By Elva from Moldova - 2017.12.31 14:53
    Products and services are very good, our leader is very satisfied with this procurement, it is better than we expected,
    5 Stars By Louis from Sri Lanka - 2017.06.29 18:55