Likotoana tsa Silicide tsa Tungsten

Tungsten silicide WSi2 e sebelisoa e le sesebelisoa sa ho sisinyeha ha motlakase ka har'a li-microelectronics, ho sutumetsa mehala ea polysilicon, anti-oxidation coating le terata ea ho hanyetsa. Tungsten silicide e sebelisoa e le thepa ea ho ikopanya ho microelectronics, e nang le resistivity ea 60-80μΩcm. E entsoe ka 1000 ° C. Hangata e sebelisoa e le shunt bakeng sa melapo ea polysilicon ho eketsa conductivity ea eona le ho eketsa lebelo la pontšo. Tungsten Silicide layer e ka lokisoa ka ho beha mouoane oa lik'hemik'hale, joalo ka ho beha mouoane. Sebelisa monosilane kapa dichlorosilane le tungsten hexafluoride e le khase e tala. Filimi e kentsoeng ha e na stoichiometric mme e hloka annealing hore e fetoloe ka mokhoa o tsitsitseng oa stoichiometric.

Tungsten silicide e ka nka sebaka sa filimi ea pejana ea tungsten. Tungsten silicide e boetse e sebelisoa e le mokoallo oa mokoallo pakeng tsa silicon le litšepe tse ling.

Tungsten silicide le eona e bohlokoa haholo lits'ebetsong tsa microelectromechanical, tseo har'a tsona silicide ea tungsten e sebelisoang haholo e le filimi e tšesaane bakeng sa ho etsa li-microcircuits. Bakeng sa morero ona, filimi ea silika ea tungsten e ka etsoa ka plasma e sebelisa, mohlala, silicide.

Rich Special Materials e sebetsa ka ho khetheha Tlhahisong ea Sputtering Target mme e ka hlahisa Tungsten Silicide.likotoanaho latela litlhaloso tsa Bareki. Ho fumana lintlha tse ling, ka kopo ikopanye le rona.