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Silicon ea Titanium

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Tlhaloso e Khutšoanyane:

Sehlopha	Sepheo sa Alloy Sputtering
Foromo ea Lik'hemik'hale	TiSi
Sebopeho	Silicon ea Titanium
Bohloeki	99.7%, 99.9%, 99.95%
Sebopeho	Lipoleiti, Lipehelo tsa Kholomo, li-arc cathodes, tse entsoeng ka mokhoa o ikhethileng
Mokhoa oa Tlhahiso	Ho qhibiliha ha Vacuum, PM
Boholo bo fumanehang	L≤2000mm, W≤200mm

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Tlhaloso ea Sepheo sa Titanium Silicon Sputtering

Ho ka etsoa seaparo sa Nitride se thata haholo ha Titanium Silicon e kopantsoe le khase ea Nitrogen nakong ea ts'ebetso ea ho beha. Sebopeho sa Silicon se teng se netefatsa boits'oaro bo phahameng ba ho hanyetsa oxidation, athe Titanium - thata. E ka bonts'a thepa e ntle ea ho hanyetsa esita le ka mocheso o phahameng haholo. Lisebelisoa tsa ho itšeha tse kentsoeng ke ho roala ha TiSiN li loketse ho sila ka lebelo le phahameng le ka thata, haholo-holo ka ho itšeha ho omileng, 'me ho ka sebetsana le li-alloys tse ling tse ntle haholo, tse kang Nickel le Titanium base base alloys.

Lipheo tsa rona tse tloaelehileng tsa TiSi le thepa ea tsona

	Ti-15Siho%	Ti-20Siho%	Ti-25Siho%	Ti-30Siho%
Bohloeki (%)	99.9	99.9	99.9	99.9
Botenya（g/cm³）	4.4	4.35	4.3	4.25
Gpula Boholo(µm)	200/100	100	100	100
Tshebetso	VAR/HIP	HIP	HIP	HIP

Khamphani ea rona e na le boiphihlelo ba lilemo tse ngata ba ho etsa lipehelo tsa sputtering bakeng sa lisebelisoa tsa ho seha hlobo. Ti-15Si at%, e entsoeng ka ho qhibiliha ha vacuum, e na le sebopeho sa homogeneous, bohloeki bo phahameng le khase e tlaase. Ntle ho moo, re boetse re fana ka Ti-15Si ho%, Ti-20Si ho% le Ti-25Si ho% e hlahisoang ka tšepe ea matla. Lipheo tsa rona tsa TiSi li na le lisebelisoa tse ntle haholo tsa mochini, tse etsang hore li se ke tsa senyeha habonolo le ho hloleha ha sebopeho.

Titanium Silicon Sputtering Target Packaging

Sepheo sa rona sa Titanium Silicon sputter se tšoailoe ka ho hlaka le ho ngoloa ka ntle ho netefatsa boitsebiso bo nepahetseng le taolo ea boleng. Ho hlokomeloa haholo ho qoba tšenyo leha e le efe e ka bakoang nakong ea polokelo kapa ea lipalangoang.

Fumana Lebitso

Lipheo tsa RSM's Titanium Silicon sputtering targets ke tsa bohloeki bo phahameng haholo le junifomo. Li fumaneha ka mefuta e fapaneng, purities, boholo le litheko. Re sebetsa ka ho khetheha ho hlahiseng lisebelisoa tsa ho roala filimi tse hloekileng tse tšesaane tse nang le ts'ebetso e ntle ka ho fetesisa hammoho le boholo bo phahameng ka ho fetesisa ba lijo-thollo tse ka sebelisoang ho roala hlobo, mokhabiso, likarolo tsa koloi, khalase e tlase-E, potoloho e kopaneng ea semi-conductor, filimi e tšesaane. ho hanyetsa, ponts'o ea litšoantšo, sebaka sa sefofane, ho rekota ka matla a khoheli, skrine ea ho ama, betri ea letsatsi e tšesaane ea filimi le lits'ebetso tse ling tsa 'mele tsa ho beha mouoane (PVD). Ka kopo re romelle potso mabapi le litheko tsa hajoale mabapi le lipehelo tsa sputtering le lisebelisoa tse ling tsa deposition tse sa thathamisitsoeng.