Indasteri ea semiconductor hangata e bona lentsoe bakeng sa lisebelisoa tse shebiloeng, tse ka aroloang ka lisebelisoa tsa wafer le lisebelisoa tsa ho paka. Lisebelisoa tsa ho paka li na le lithibelo tse tlase tsa tekheniki ha li bapisoa le lisebelisoa tsa ho etsa li-wafer. Ts'ebetso ea tlhahiso ea li-wafers haholo-holo e kenyelletsa mefuta e 7 ea lisebelisoa tsa semiconductor le lik'hemik'hale, ho kenyeletsoa mofuta o le mong oa thepa e lebisitsoeng ho sputtering. Joale thepa e reretsoeng ke efe? Ke hobane’ng ha boitsebiso boo ho builoeng ka bona e le ba bohlokoa hakaale? Kajeno re tla bua ka hore na thepa e reretsoeng ke efe!
Boitsebiso bo reretsoeng ke bofe?
Ka mantsoe a bonolo feela, thepa e shebiloeng ke thepa e shebiloeng e hlasetsoeng ke likaroloana tse qosoang ka lebelo le phahameng. Ka ho nkela sebaka sa lisebelisoa tse fapaneng tse shebiloeng (tse kang aluminium, koporo, tšepe e sa hloekang, titanium, lipakane tsa nickel, joalo-joalo), litsamaiso tse fapaneng tsa lifilimi (tse kang li-superhard, tse sa apereng, li-anti-corrosion alloy films, joalo-joalo) li ka fumanoa.
Hajoale, (bohloeki) lisebelisoa tsa sepheo sa sputtering li ka aroloa ka:
1) Lipheo tsa tšepe (aluminium e hloekileng ea tšepe, titanium, koporo, tantalum, joalo-joalo)
2) Lipheo tsa alloy (nickel chromium alloy, nickel cobalt alloy, joalo-joalo)
3) Lipheo tsa metsoako ea ceramic (li-oxides, silicides, carbides, sulfides, joalo-joalo).
Ho ea ka li-switches tse fapaneng, e ka aroloa ka: sepheo se selelele, sepheo sa lisekoere, le sepheo se chitja.
Ho ea ka likarolo tse fapaneng tsa ts'ebeliso, e ka aroloa ka: sepheo sa semiconductor chip, sepheo sa ho bonts'a liphanele tse bataletseng, litebello tsa lisele tsa letsatsi, lipehelo tsa polokelo ea tlhahisoleseling, lipheo tse fetotsoeng, sepheo sa lisebelisoa tsa elektroniki le tse ling.
Ka ho sheba sena, u ka be u fumane kutloisiso ea lipheo tse phahameng tsa ho hloeka ha metsi, hammoho le aluminium, titanium, koporo le tantalum e sebelisoang lipehelo tsa tšepe. Ha ho etsoa semiconductor wafer, mokhoa oa aluminium hangata ke mokhoa o ka sehloohong oa ho etsa li-wafers tse 200mm (8 inches) le ka tlase, mme lisebelisoa tse shebiloeng tse sebelisoang haholo-holo ke aluminium le likarolo tsa titanium. 300mm (12 inch) tlhahiso ea liphaephe, haholo-holo e sebelisa theknoloji e tsoetseng pele ea khokahanyo ea koporo, haholo-holo e sebelisa lipakane tsa koporo le tantalum.
Motho e mong le e mong o lokela ho utloisisa hore na thepa e reretsoeng ke efe. Ka kakaretso, ka mefuta e mengata e ntseng e eketseha ea lisebelisoa tsa chip le tlhokahalo e ntseng e eketseha 'marakeng oa li-chip, ho tla ba le keketseho ea tlhokahalo ea lisebelisoa tse' nè tsa tšepe tse tšesaane tse kholo indastering, e leng aluminium, titanium, tantalum le koporo. 'Me hona joale, ha ho na tharollo e' ngoe e ka nkang sebaka sa lisebelisoa tsena tse 'nè tse tšesaane tsa tšepe.
Nako ea poso: Jul-06-2023