Polysilicon ke sesebelisoa sa bohlokoa sa ho sputtering. Ho sebelisa mokhoa oa magnetron sputtering ho lokisetsa SiO2 le lifilimi tse ling tse tšesaane ho ka etsa hore thepa ea matrix e be le khanyetso e ntle ea optical, dielectric le corrosion, e sebelisoang haholo ho li-touch screen, optical le liindasteri tse ling.
Mokhoa oa ho lahlela likristale tse telele ke ho hlokomela ho tiea ha silicon ea mokelikeli ho tloha tlase ho ea holimo butle-butle ka ho laola ka nepo mocheso oa heater sebakeng se chesang sa sebōpi sa ingot le ho qhalana ha mocheso oa thepa ea ho kenya mocheso le mocheso. ho tiisa lebelo la likristale tse telele ke 0.8 ~ 1.2cm/h. Ka nako e ts'oanang, ts'ebetsong ea ho tiisa tataiso, phello ea karohano ea likarolo tsa tšepe ka thepa ea silicon e ka phethahala, boholo ba lisebelisoa tsa tšepe li ka hloekisoa, 'me ho ka thehoa sebopeho sa lijo-thollo tsa polycrystalline silicon.
Casting polysilicon e boetse e hloka ho etsoa ka boomo ts'ebetsong ea tlhahiso, e le ho fetola khatello ea litšila tse amohelang silicon e qhibiliha. Ntho e ka sehloohong ea dopant ea p-type cast cast polysilicon indastering ke silicon boron master alloy, eo ho eona litaba tsa boron li ka bang 0.025%. Palo ea doping e khethoa ke sepheo sa ho hanyetsa sephaphatha sa silicon. The optimally resistivity ke 0.02 ~ 0.05 Ω • cm, 'me mahloriso a boron a lekanang a ka bang 2 × 1014cm-3. Leha ho le joalo, coefficient ea karohano ea boron ka silicon ke 0.8, e tla bontša phello e itseng ea karohano ts'ebetsong ea ho tiisa tataiso, hore ke hore, karolo ea boron e ajoa ka gradient ka lehlakoreng le otlolohileng la ingot, 'me resistivity butle-butle. fokotseha ho tloha tlase ho ea holimo ho ingot.
Nako ea poso: Jul-26-2022