Vacuum plating ha ho khethoa thepa e shebiloeng ea sputtering e bile bothata ho batho, hajoale, joalo ka ha ho roala metsi, haholoholo nts'etsopele ea litsebo tsa ho roala magnetron, ho ka boleloa hore tlhahisoleseling leha e le efe e ka khona ho lebisa tlhokomelo ea thepa ea lifilimi tse tšesaane. ka ion bombardment, hobane ka ho fafatsa lintho tse shebiloeng nakong ea ho koaheloa ho ea ho mofuta oa substrate, ho na le phello ea bohlokoa boleng ba sputtering. filimi, ka hona, litlhoko tsa thepa tse shebiloeng li thata ho feta. Mona re tla ithuta ka karolo ea sepheo sa sputtering ka koae ea vacuum hammoho le Mohlophisi oa Beijing Relaxation.
一、Molao-motheo oa khetho le likarolo tsa thepa e shebiloeng
Ha ho khethoa thepa e shebiloeng, ntle le tšebeliso ea filimi ka boeona e lokela ho khethoa, mathata a latelang a lokela ho nahanoa:
Bothata ba 1. Ho ea ka litlhoko tsa tšebeliso le ts'ebetso ea lera, hoa hlokahala hore thepa e reretsoeng ho finyella litlhoko tsa tekheniki tsa bohloeki, litaba tsa limakasine, ho tšoana ha likarolo, ho nepahala ha mochine joalo-joalo.
Bothata ba 2. Thepa e lebisitsoeng e lokela ho ba le matla a matle a mochine le botsitso ba lik'hemik'hale ka mor'a ho etsa filimi;
Bothata ba 3. Hoa hlokahala hore thepa ea filimi e hlahise filimi e kopantsoeng habonolo ka khase e arabelang e le filimi e tsitsitseng ea sputtering;
Bothata ba 4. Hoa hlokahala ho beha sepheo le matrix hore e be matla, ho seng joalo, thepa ea filimi e nang le ho khomarela hantle le matrix e lokela ho amoheloa, pele u fafatse lera la filimi e ka tlase ebe u lokisetsa lera le hlokahalang la filimi;
Potso ea 5. Sebakeng sa ho finyella litlhoko tsa ts'ebetso ea filimi, e nyenyane phapang pakeng tsa coefficient ea ho atolosa mocheso oa sepheo le matrix, ho molemo, e le ho fokotsa tšusumetso ea khatello ea mocheso ea filimi ea sputtering;
Tokisetso ea liphofu tse 'maloa tse sebelisoang hangata
(1) c target
Chromium e le thepa ea filimi ea sputtering ha e bonolo feela ho kopanya le thepa ea motheo e na le ho khomarela holimo, 'me filimi ea chromium le oxide CrQ3, thepa ea eona ea mechine, ho hanyetsa acid le botsitso ba mocheso li molemo.
Beijing Ruichi High-tech Co., Ltd. e sebetsa haholo ho: target ea titanium zirconium target, aluminium target, nickel target, chromium target, target ea tungsten, target ea molybdenum, copper target, silicon target, niobium target, tantalum target, titanium-silicon alloy. target, titanium-niobium alloy target, titanium-tungsten alloy target, titanium-zirconium alloy target, nickel-chromium alloy target, silica-aluminium alloy target, nickel-vanadium alloy target, chromium-aluminium-silicon ternary alloy target，Ti al si ternary alloy target material, e sebelisoang haholo ho khabisa / holim'a metsi a thata le a sebetsang hantle. ho roala, khalase ea meralo, pontšo e bataletseng / optical photoelectric, polokelo ea mahlo, lisebelisoa tsa elektroniki, khatiso le mesebetsi e meng.
Nako ea poso: Jun-02-2022