Daahan Magnetron sputtering waa hab cusub oo daahan uumiga jirka, marka la barbar dhigo habka daahan uumi hore, faa'iidooyinka ay dhinacyo badan oo aad u cajiib ah. Sida tignoolajiyada qaan-gaadhka ah, sputtering magnetron ayaa lagu dabaqay meelo badan.
Mabda'a sputtering Magnetron:
Goob magnetic orthogonal ah iyo goob koronto ayaa lagu daraa inta u dhaxaysa tiirka bartilmaameedka ah (cathode) iyo anode-ka, gaaska loo baahan yahay (sida caadiga ah gaaska Ar) ayaa lagu buuxiyaa qolka faakuumka sare. Magnet-ka joogtada ahi waxa uu samaysaa dhul magnetic 250-350 gaus ah oo ku yaala dusha sare ee walaxda la hiigsanayo, iyo goobta korantada ee orthogonal waxa ay ka kooban tahay koronto sare. Under saamaynta beerka korontada, Ar gaaska ionization galay ion togan iyo electrons, bartilmaameed oo uu leeyahay cadaadis taban gaar ah, ka bartilmaameed ka cirka by saamaynta field magnetic iyo korodhka itimaalka ionization gaaska shaqada, sameeyaan Plasma cufnaanta sare u dhow cathode, Ar ion oo hoos timaada ficilka lorentz, xawaaraha u duulista dusha sare ee bartilmaameedka, duqaynta dusha sare ee xawaaraha sare, Atomyada la jeexjeexay ee bartilmaameedka ayaa raacaya mabda'a isbeddelka xawaaraha iyo Ka soo duulo dusha bartilmaameedka leh tamar sare oo aad u qaado filimka kaydinta substrate.
Tuuritaanka Magnetron guud ahaan waxa loo qaybiyaa laba nooc: sputtering DC iyo RF sputtering. Mabda'a qalabka wax lagu dhufto ee DC waa mid fudud, heerkuna waa dhakhso marka biraha la daadiyo. Isticmaalka sputtering RF waa mid aad u ballaaran, marka lagu daro dhuujinta alaabta wax-qabadka, laakiin sidoo kale xajinta walxaha aan waxtarka lahayn, laakiin sidoo kale diyaarinta xajinta falcelinta ee oxides, nitrides iyo karbides iyo walxaha kale ee isku dhafan. Haddii inta jeer ee RF uu kordho, waxay noqotaa mikrowave plasma sputtering. Waqtigan xaadirka ah, resonance electron cyclotron (ECR) nooca microwave sputtering balasmaha ayaa caadi ahaan loo isticmaalaa.
Daahan daahan Magnetron sputtering walxaha bartilmaameedka:
Walxaha dahaadhida birta, daahan daahan daahan daahan daahan, dhoobada dhoobada, dhoobada boride dhoobada, carbide dhoobada, fluoride dhoobada, nitride dhoobada, nitride dhoobada, selenide dhoobada, selenide, selenide, silicide dhoobada sputtering walxaha bartilmaameedka, sulfide Waxyaalaha bartilmaameedka ah ee dhoobada, Telluride bartilmaameedka dhoobada dhoobada, bartilmaameedka kale ee dhoobada, bartilmaameedka dhoobada chromium-doped silicon oxide bartilmaameedka (CR-SiO), bartilmaameedka fosfide indium (InP), bartilmaameedka arsenide (PbAs), bartilmaameedka indium arsenide (InAs).
Waqtiga boostada: Agoosto-03-2022