Isticmaalayaal badan ayaa laga yaabaa inay maqleen wax ku saabsan wax soo saarka bartilmaameedka sputtering, laakiin mabda'a bartilmaameedka sputtering waa inuu ahaadaa mid aan la aqoon. Hadda, tifaftirahaAlaabta Gaarka ah ee Qani (RSM) waxay wadaagaan mabaadi'da sputtering magnetron ee bartilmaameedka sputtering.
Goobta magnetic orthogonal iyo beerta korantada ayaa lagu daraa inta u dhaxaysa electrode bartilmaameedka (cathode) iyo anode, gaaska loo baahan yahay (guud ahaan gaaska Ar) waxaa lagu buuxiyaa qolka faaruqinta sare, magnet joogto ah wuxuu sameeyaa 250 ~ 350 Gauss magnetic field on dusha sare ee xogta la beegsanayo, iyo goobta korantada ee orthogonal electromagnetic waxaa la sameeyay koronto-sare oo koronto ah.
Marka la eego saamaynta beerta korantada, gaaska Ar waxa loo ionized ion togan iyo electrons. Xoogaa sare oo taban oo gaar ah ayaa lagu daraa bartilmaameedka. Saamaynta duurka magnetic on electrons ka soo baxay cirifka bartilmaameedka iyo itimaalka ionization ee korodhka gaasta shaqada, samaynta balasma cufnaanta sare u dhow cathode ah. Marka la eego saameynta xoogga Lorentz, Ar ions waxay ku dadajiyaan dusha bartilmaameedka waxayna duqeeyaan dusha sare ee bartilmaameedka xawaare aad u sarreeya, Atomyada qulqulaya ee bartilmaameedku waxay raacaan mabda'a isbeddelka xawaaraha waxayna ka duulaan dusha bartilmaameedka iyagoo u duulaya substrate leh tamar sare in lagu shubo filimada.
Tuuritaanka Magnetron guud ahaan waxa loo qaybiyaa laba nooc: sputtering Tributary iyo RF sputtering. Mabda'a qalabka sputtering tributary waa mid fudud, iyo heerkeedu sidoo kale waa dhakhso marka biraha la tufayo. RF sputtering si weyn ayaa loo isticmaalaa. Marka laga soo tago in ay ku tufi karto alaabada korantada, waxa ay sidoo kale daadin kartaa alaabta aan shaqaynayn. Isla mar ahaantaana, waxay sidoo kale qabataa sputtering fal-celin ah si ay u diyaariyaan qalabka oksaydhyada, nitrides, karbides iyo xeryahooda kale. Haddii inta jeer ee RF la kordhiyo, waxay noqon doontaa mikrowave plasma sputtering. Hadda, resonance electron cyclotron (ECR) mikrowave balasmaha sputtering ayaa caadi ahaan loo isticmaalaa.
Waqtiga boostada: Meey-31-2022