Waa inaan aad ula soconaa yoolka hadda, hadda suuqa bartilmaameedka ayaa sidoo kale sii kordhaya, kuwa soo socda waa waxa 'waxqabadka ugu weyn ee bartilmaameedka sputtering uu wadaago tifaftiraha RSM
daahirnimada
Nadiifinta walxaha bartilmaameedku waa mid ka mid ah tilmaamayaasha waxqabadka ugu muhiimsan, sababtoo ah nadiifinta walxaha bartilmaameedku waxay saameyn weyn ku leedahay waxqabadka filimka khafiifka ah. Si kastaba ha ahaatee, codsiga dhabta ah, shuruudaha nadiifka ah ee alaabta bartilmaameedku maaha mid isku mid ah. Tusaale ahaan, iyada oo horumarinta degdega ah ee warshadaha microelectronics, cabbirka silikoon ee jajabka ayaa laga soo saaray 6 ", 8" ilaa 12 ", iyo ballaca fiilooyinka ayaa laga dhimay 0.5um ilaa 0.25um,0.18um ama xitaa 0.13um. Markii hore, nadiifnimada 99.995% walxaha la beegsanayo waxay buuxin kartaa shuruudaha nidaamka 0.35umIC. Nadiifinta walxaha bartilmaameedku waa 99.999% ama xitaa 99.9999% diyaarinta khadadka 0.18um.
Waxyaalo wasakhaysan
Wasakhda ku jirta bartilmaameedka adag iyo uumiga oksijiinta iyo biyaha ee daloolada ayaa ah ilaha wasakhda ugu weyn ee soo saarista filimka. Alaabta la beegsanayo ee ujeedooyinka kala duwan waxay leeyihiin shuruudo kala duwan oo ku saabsan nuxurka wasakhda ah ee kala duwan. Tusaale ahaan, bartilmaameedyada aluminium iyo aluminium saafi ah oo loo isticmaalo warshadaha semiconductor waxay leeyihiin shuruudo gaar ah oo ku saabsan nuxurka biraha alkali iyo walxaha shucaaca.
Cufnaanta
Si loo yareeyo porosity ee bartilmaameedka adag oo loo hagaajiyo waxqabadka filimka sputtering, cufnaanta sare ee bartilmaameedka ayaa badanaa loo baahan yahay. Cufnaanta bartilmaameedku ma saameynayso oo kaliya heerka xajinta laakiin sidoo kale qalabka korontada iyo indhaha ee filimka. Cufnaanta sare ee bartilmaameedka, ayaa ka sii fiicnaan doonta waxqabadka filimka. Intaa waxaa dheer, kordhinta cufnaanta iyo xoogga bartilmaameedka waxay ka dhigaysaa bartilmaameedku inuu si fiican u adkaysto cadaadiska kulaylka ee habka xajinta. Cufnaanta sidoo kale waa mid ka mid ah tusmooyinka waxqabadka muhiimka ah ee bartilmaameedka.
Cabbirka hadhuudhka iyo qaybinta cabbirka hadhuudhka
Hadafka badanaa waa polycrystalline leh cabbirka hadhuudh u dhexeeya mikromitir ilaa millimitir. Isla bartilmaameedka, heerka qulqulka ee bartilmaameedka leh miraha yar yar ayaa ka dhaqso badan kan bartilmaameedka leh miraha waaweyn. Qaybinta dhumucda filimada ee lagu xareeyay bartilmaameedka sputtering ee leh farqiga cabbirka hadhuudhka yar (qaybinta lebbiska) ayaa ka sii badan.
Waqtiga boostada: Agoosto-04-2022