Polysilicon yakakosha sputtering yakanangana nezvinhu. Kushandisa magnetron sputtering nzira kugadzirira SiO2 uye mamwe mafirimu matete anogona kuita kuti matrix zvinhu zvive nani optical, dielectric uye corrosion resistance, iyo inoshandiswa zvakanyanya mu touch screen, optical uye mamwe maindasitiri.
Iyo nzira yekukanda makristasi akareba ndeyekuona iyo inotungamira kusimba kweiyo silicon yemvura kubva pasi kusvika kumusoro zvishoma nezvishoma nekunyatso kudzora tembiricha yeheater mundima inopisa yevira yeingot uye kupisa kwekupisa kweiyo thermal insulation material, uye kusimba makristasi akareba kumhanya ndeye 0.8 ~ 1.2cm/h. Panguva imwecheteyo, mukuita kwekusimba kwekusimba, kupatsanurwa kwezvinhu zvesimbi musilicon zvinhu zvinogona kuitika, zvakawanda zvesimbi zvinhu zvinogona kucheneswa, uye yunifomu yepolycrystalline silicon chimiro chezviyo chinogona kuumbwa.
Kukandira polysilicon inodawo kuitwa nemaune mukuita kwekugadzira, kuitira kuti uchinje kusangana kwekugamuchira tsvina musilicon kunyungudika. Iyo huru dopant yep-mhando yakakandwa polysilicon muindasitiri iyi silicon boron master alloy, umo iyo boron yemukati inenge 0.025%. Huwandu hwedoping hunotemerwa neicho chinonangwa resistivity chesilicon wafer. The optimal resistivity is 0.02 ~ 0.05 Ω • masendimita, uye inowirirana boron concentration inenge 2 × 1014cm-3. Zvisinei, kupatsanurwa kweboron musilicon ndeye 0.8, iyo icharatidza imwe mutsara wekupatsanurwa mugwara rekusimbisa nzira, iyo ndiko kuti, iyo boron element inogoverwa mune gradient munzira yakatwasuka yeingot, uye iyo resistivity zvishoma nezvishoma. inoderera kubva pasi kusvika kumusoro kweingot.
Nguva yekutumira: Jul-26-2022