Isu tese tinoziva kuti kune akawanda mataurirwo e sputtering chinangwa,iyo ine awide mhando yekushandisa.Tanotarisa mhando dzinowanzo shandiswa mumaindasitiri akasiyana siyanawo, nhasi ngatiuye pamwe BeijingRichmat pamwe chete kuti tidzidze nezve sputtering chinangwa indasitiri classification.
一,Tsanangudzo yekutuka kunonangwa zvinhu
Sputtering ndeimwe yeakanyanya matekinoroji ekugadzirira matete firimu zvinhu. Inoshandisa maion anogadzirwa neion source kugadzira ion beam ine high velocity simba kuburikidza nekukasira kuunganidza muvacuum.Bombarded solid surface, maion uye maatomu akasimba epamusoro ane kinetic simba rekuchinjana, kuitira kuti maatomu ari panzvimbo yakasimba anosiya akasimba uye anoisa pa. iyo substrate pamusoro, iyo yakabhomba yakasimba ndiyo mbishi yekugadzirira sputtering yakaiswa firimu, inozivikanwa seye sputtering target.
二,Chishandiso chemumunda kupatsanurwa kwe sputtering chinangwa zvinhu
1,Semiconductor chinangwa
(1)Zvinowanzoshandiswa zvinhu:Zvinangwa zvakajairika mundima iyi zvinosanganisira tantalum, mhangura, titanium, aluminium, goridhe, nickel uye mamwe masimbi anonyungudika.
(2)Usage:Kunyanya shandisa pane yakakosha data yepakutanga yedunhu rakasanganiswa
(3)Zvinodiwa zvekushanda:Izvo zvinodiwa zvehunyanzvi pakuchena, ukuru, kubatanidzwa kwakakwira.
2,Target material ye planar display
(1)Zvinowanzoshandiswa zvinhu:Zvinangwa zvinowanzoshandiswa mundima iyi zvinosanganisira aluminium/copper/molybdenum/nickel/niobium/silicon/chromium, nezvimwewo.
(2)Usage:Rudzi urwu rwezvinhu zvinonangwa runonyanya kushandiswa mumhando dzakasiyana dzenzvimbo huru firimu reTV uye notebook.
(3)Zvinodiwa zvekushanda:High zvinodiwa pakuchena, nzvimbo huru, kufanana uye zvichingodaro.
3,Zvinangwa zvemasero ezuva
(1)Zvinowanzoshandiswa zvinhu:Aluminium/copper/Molybdenum/chromium/ITO/Ta zvinonangwa zvinowanzoshandiswa mumasero ezuva.
(2)Usage:Inonyanya kushandiswa mu "window layer", barrier layer, electrode uye conductive film uye zvimwe zviitiko.
(3)Zvinodiwa zvekushanda:Hunyanzvi hwepamusoro hunodiwa, huwandu hwakawanda hwekushandisa.
4,Target zvinhu zvekuchengetedza ruzivo
(1)Zvinowanzoshandiswa zvinhu:Kuchengetedza ruzivo kunowanzoshandiswa cobalt/nickel/ferroalloy/chromium/tellurium/selenium target materials.
(2)Usage:Izvo zvinonangwa pano zvinonyanya kushandiswa kune musoro, yepakati layer uye yepasi layer ye cd-rom neCD.
(3)Kushanda zvinodiwa:High kuchengetedza density uye yakakwirira kutapurirana kumhanya kunodiwa.
5,Target zvinhu zvekugadzirisa chishandiso
(1)Zvinowanzoshandiswa zvinhu:Chishandiso chekugadzirisa titanium/zirconium/lattice/chrome-aluminium alloy nezvimwe zvinangwa.
(2)Kushandisa:Inowanzo shandiswa pakuwedzera kutaridzika.
(3)Zvinodiwa zvekushanda:High functional zvinodiwa, hupenyu hurefu hwebasa.
6,Target zvinhu zvemagetsi zvigadzirwa
(1)Zvinowanzoshandiswa zvinhu:Aluminium alloy/silicide targets inowanzoshandiswa mumidziyo yemagetsi
(2)Usage:Kazhinji inoshandiswa kune firimu resistors uye capacitors.
(3)Zvinodiwa zvekushanda:Saizi diki, kugadzikana, kushomeka kwekushisa kwekushisa coefficient
Nguva yekutumira: Kubvumbi-21-2022