Vazhinji vashandisi vanofanira kunge vakanzwa nezve chigadzirwa chekupopotera chinangwa, asi musimboti wekupopotera chinangwa unofanirwa kunge usina kujaira. Zvino, mupepeti weRich Special Material(RSM) inogovera magnetron sputtering misimboti ye sputtering chinangwa.
Iyo orthogonal magineti uye munda wemagetsi inowedzerwa pakati peyakaputwa yakanangwa electrode (cathode) uye anode, inodiwa inert gasi (kazhinji Ar gasi) inozadzwa mukamuri yekuvharira yakakwira, iyo inogara magineti inoumba 250 ~ 350 Gauss magineti pa. pamusoro peiyo data yakanangwa, uye iyo orthogonal electromagnetic munda inoumbwa neiyo yakakwira-voltage yemagetsi munda.
Pasi pesimba remagetsi, Ar gasi inoiswa ionized kuita maion uye maerekitironi. Imwe yakashata yakakwira voltage inowedzerwa kune chinangwa. Mhedzisiro yemagnetic field pamaerekitironi anobudiswa kubva padanda rinotarirwa uye mukana weionization wekushanda kwegasi kuwedzera, kuumba high-density plasma pedyo ne cathode. Pasi pesimba reLorentz simba, Ar ions inomhanyisa kuenda kwainonangwa uye kubhomba kwainotarirwa nekumhanya kwakanyanya, Iwo maatomu akapushwa pachinangwa anotevera musimboti wekushandura uye kubhururuka kubva panzvimbo yakanangwa kuenda kune substrate ine high kinetic simba. kuisa mafirimu.
Magnetron sputtering inowanzokamurwa kuita marudzi maviri: Tributary sputtering uye RF sputtering. Nheyo yemidziyo yekupopotera iri nyore, uye mwero wayo unokurumidza zvakare pakupfira simbi. RF sputtering inoshandiswa zvakanyanya. Kuwedzera kune sputtering conductive zvinhu, inogona zvakare sputter isiri-conductive zvinhu. Panguva imwecheteyo, inoitisa reactive sputtering kugadzirira zvinhu zveokisi, nitrides, carbides uye mamwe makomisheni. Kana iyo RF frequency yakawedzera, inova microwave plasma sputtering. Iye zvino, electron cyclotron resonance (ECR) microwave plasma sputtering inowanzoshandiswa.
Nguva yekutumira: May-31-2022