Nezve mashandisirwo uye musimboti wekupopotera tekinoroji yakanangana, vamwe vatengi vakabvunza RSM, ikozvino nekuda kwedambudziko iri iro rinonyanya kunetseka pamusoro, nyanzvi dzehunyanzvi dzinogovana ruzivo rwakanangana.
Sputtering target application:
Zvimedu zvekuchaja (senge argon ions) zvinobhomba nzvimbo yakasimba, zvichiita kuti zvimedu zvepasi zvakaita semaatomu, mamorekuru kana masumbu kutiza kubva pamusoro pechinhu chinonzi "sputtering". Mune magnetron sputtering coating, iyo yakanaka ion inogadzirwa neargon ionization inowanzo shandiswa kubhomba yakasimba (chinangwa), uye maatomu akaputika asina kwaakarerekera anoiswa pane substrate (workpiece) kuita firimu layer. Magnetron sputtering coating ine maitiro maviri: "low tembiricha" uye "nekukurumidza".
Magnetron sputtering musimboti:
An orthogonal magnetic field uye yemagetsi munda inowedzerwa pakati pe sputtered target pole (cathode) uye anode, uye inodiwa inert gasi (kazhinji Ar gas) inozadzwa mukamuri yepamusoro yevacuum. Iyo magineti yechigarire inoumba 250-350 Gauss magineti pamusoro pechinhu chakanangwa, uye inoumba orthogonal electromagnetic munda ine yakakwira voltage munda wemagetsi.
Pasi pechiito chemunda wemagetsi, Ar gasi inoiswa ion kuita maion nemaerekitironi, uye pane imwe yakashata yakanyanya kudzvanya pane chakanangana, saka maerekitironi anoburitswa kubva padonzvo rinokanganiswa nemagnetic field uye mukana weionization wekushanda. gasi rinowedzera. Yakakwira-density plasma inoumbwa padhuze necathode, uye maArion anomhanyisa kuenda kunzvimbo yakanangwa pasi pechiito cheLorentz simba uye anobhomba nzvimbo yainotarirwa nekumhanya kukuru, kuitira kuti maatomu akapushwa pachinangwa apukunyuke kubva panzvimbo yakanangwa nepamusoro. kinetic simba uye bhururukira kune substrate kuumba firimu maererano nemusimboti wekukurumidza kutendeuka.
Magnetron sputtering inowanzokamurwa kuita marudzi maviri: DC sputtering uye RF sputtering. Iyo musimboti weDC sputtering equipment iri nyore, uye chiyero chinokurumidza kana uchipfira simbi. Iko kushandiswa kweRF sputtering kwakawedzera, mukuwedzera kune sputtering conductive zvinhu, asiwo sputtering non-conductive zvinhu, asiwo reactive sputtering gadziriro yemaokisi, nitrides uye carbides nezvimwe zvinhu zvakasanganiswa. Kana iyo frequency yeRF ichiwedzera, inova microwave plasma sputtering. Parizvino, electron cyclotron resonance (ECR) mhando microwave plasma sputtering inowanzoshandiswa.
Nguva yekutumira: Aug-01-2022