Shamwari zhinji nezve kuchengetedzwa kwechinangwa kune mibvunzo yakawanda kana mishoma, munguva pfupi yapfuura kune zvakare vatengi vazhinji vari kubvunza nezve kuchengetedzwa kwechinangwa chine chekuita nematambudziko, rega mupepeti weRSM kuti tigovane nezve sputtering chinangwa chekuchengetedza ruzivo.
Zvinangwa zve sputter zvinofanira kuchengetedzwa sei?
1, Target kugadzirisa
Kuti udzivise kupfupika kwedunhu uye arcing kunokonzerwa negomba risina kuchena mune sputtering process, zvinodikanwa kuti nguva nenguva ubvise sputters dzakaunganidzwa pakati uye mativi ese ari maviri eiyo sputtering track, iyo inobatsirawo vashandisi kuti varambe vachipuruzira pane yakakwira simba density.
2, Chengetedza chengetedzo
Isu tinokurudzira kuti vashandisi vachengete chinongedzo (chingave simbi kana ceramic) muvacuum packaging, kunyanya iyo yakafanira tarisiro inofanirwa kuchengetwa muvacuum kudzivirira iyo oxidation yeyakakodzera layer kubva pakukanganisa kunaka kwakakodzera. Kana iri kurongedza kwezvinangwa zvesimbi, isu tinokurudzira kuti dzinofanirwa kuiswa mumabhegi epurasitiki akachena zvishoma.
3, Chinangwa chekuchenesa
Danho rekutanga nderekuchenesa nemucheka wakasununguka wakasununguka wakanyoroveswa muacetone;
Danho rechipiri rakafanana nedanho rekutanga, kuchenesa nedoro;
Danho rechitatu: chenesa nemvura yakasvibiswa. Mushure mekuchenesa nemvura yakasvibiswa, chinangwa chinoiswa muchoto uye chakaomeswa pa100 ℃ kwemaminitsi makumi matatu. Zvinokurudzirwa kushandisa "lint yemahara jira" kuchenesa oxide uye ceramic zvinangwa.
Nhanho yechina ndeyekugeza chinangwa neargon nepamusoro-soro uye hunyoro hushoma kuti ubvise chero zvimedu zvisina kuchena zvinogona kukonzera arc mune sputtering system.
4, Short circuit uye tightness cheki
Mushure mekunge chinangwa chaiswa, iyo cathode yese inoda kuongororwa kupfupi dunhu uye kusimba. Inokurudzirwa kutonga kana kune dunhu diki mu cathode nekushandisa mita yekupikisa uye megger. Mushure mekusimbisa kuti hapana dunhu rakapfupika mu cathode, kuongororwa kwekudonha kwemvura kunogona kuitwa, uye mvura inogona kuunzwa mu cathode kuti ione kana paine kubuda kwemvura.
5. Kurongedza uye kutakura
Zvese zvinangwa zvakarongedzerwa mumabhegi epurasitiki akavharidzirwa ane hunyoro-uchapupu. Iyo yekunze pasuru kazhinji ibhokisi remapuranga rine anti-kudhumhana layer yakatenderedza kuchengetedza chinongedzo uye backplane kubva mukukuvadzwa panguva yekufambisa nekuchengetedza.
Nguva yekutumira: Jul-15-2022