Chidzidzo chitsva mujenari Dhaimondi uye Zvinoenderana Zvishandiso zvinotarisa pakuiswa kwepolycrystalline diamond ine FeCoB etchant kugadzira mapatani. Nekuda kwekuvandudzwa kwehunyanzvi hwekuvandudza tekinoroji, madhaimondi anogona kuwanikwa pasina kukuvara uye nekukanganisa kushoma.
Tsvagiridzo: Spatial inosarudza kuiswa kwedhaimondi munzvimbo yakasimba uchishandisa FeCoB ine photolithographic pateni. Mufananidzo wechikwereti: Bjorn Wilezic/Shutterstock.com
Kuburikidza neiyo solid-state diffusion process, FeCoB nanocrystalline mafirimu (Fe: Co:B = 60:20:20, atomic ratio) anogona kuwana lattice kunanga uye kubviswa kwemadhaimondi mune microstructure.
Madhaimani ane akasiyana biochemical uye anoona hunhu, pamwe nekukwirira elasticity uye simba. Kusimba kwayo kwakanyanya ndiko kwakakosha sosi yekufambira mberi mu Ultra precision machining (dhaimondi inoshandura tekinoroji) uye nzira yekumanikidzwa kwakanyanya muhuwandu hwemazana eGPa.
Kemikari impermeability, kusimba kwekuona uye biological chiitiko inowedzera dhizaini mikana yemasisitimu anoshandisa aya anoshanda hunhu. Dhaimondi rakazviitira zita muminda ye mechatronics, optics, sensors uye data management.
Kugonesa kushandiswa kwawo, kusungirirwa kwemadhaimani nemaitiro awo kunogadzira matambudziko ari pachena. Reactive ion etching (RIE), inductively yakabatana plasma (ICP), uye maelectron beam induced etching mienzaniso yemasisitimu aripo anoshandisa etching matekiniki (EBIE).
Zvimiro zvemadhaimani zvinogadzirwa zvakare uchishandisa laser uye yakatarisana neion beam (FIB) maitiro ekugadzirisa. Chinangwa cheiyi nzira yekugadzira ndeyekumhanyisa delamination pamwe nekubvumira kuyera pamusoro penzvimbo dzakakura muzvimiro zvekugadzira zvinoteedzana. Aya maitiro anoshandisa etchants yemvura (plasma, magasi, uye zvigadziriso zvemvura), izvo zvinomisa kuoma kwejometri kugoneka.
Iri basa rinotyisa rinodzidza kubviswa kwemakemikari nekugadzirwa kwemhute uye rinogadzira polycrystalline diamond ine FeCoB (Fe:Co:B, 60:20:20 atomic muzana) pamusoro. Iko kutarisisa kukuru kunobhadharwa pakusikwa kweTM modhi kune chaiyo etching yemamita-scale zvimiro mumadhaimondi. Iyo dhaimani iri pasi inosungirirwa kune nanocrystalline FeCoB nekupisa kurapwa pa700 kusvika 900 ° C kwemaminetsi makumi matatu kusvika makumi mapfumbamwe.
Chimiro chakasimba chemuenzaniso wedhaimani chinoratidza pasi pepolycrystalline microstructure. Kukasharara (Ra) mukati mechikamu chimwe nechimwe chaive 3.84 ± 0.47 nm, uye kushata kwepamusoro kwaive 9.6 ± 1.2 nm. Hushasha (mukati medhaimani imwe tsanga) yeFeCoB simbi yakasimwa iri 3.39 ± 0.26 nm, uye kureba kwedhizaini i100 ± 10 nm.
Mushure mekuvhara pa 800 ° C kwemaminitsi makumi matatu, kukora kwesimbi kwakawedzera kusvika 600 ± 100 nm, uye kushata kwepamusoro (Ra) kwakawedzera kusvika 224 ± 22 nm. Munguva yekuvhara, maatomu ecarbon anopararira muFeCoB layer, zvichikonzera kuwedzera kwehukuru.
Sampuli nhatu dzine FeCoB layers 100 nm gobvu dzakapiswa patembiricha ye700, 800, uye 900 ° C, zvichiteerana. Kana tembiricha iri pazasi 700 ° C, hapana chakakosha kubatana pakati pedhaimani neFeCoB, uye zvishoma zvinhu zvinobviswa mushure mekurapwa kwehydrothermal. Kubvisa zvinhu kunokwidziridzwa kusvika kune tembiricha iri pamusoro pe800 ° C.
Pakasvika tembiricha pa900°C, mwero we etching wakawedzera kaviri zvichienzaniswa netembiricha ye800°C. Nekudaro, iyo mbiri yenzvimbo yakatemerwa yakasiyana zvakanyanya neiyo yakasimwa etch sequences (FeCoB).
Schematic inoratidza kuona kweiyo yakasimba mamiriro etchant kugadzira patani: Spatially inosarudza yakasimba mamiriro ekuisa madhaimani uchishandisa photolithographically patterned FeCoB. Chikwereti chemufananidzo: Van Z. uye Shankar MR et al., Madhaimondi uye Zvishandiso Zvinoenderana.
FeCoB samples 100 nm gobvu pamadhaimani akagadziriswa pa800 ° C kwe30, 60, uye 90 maminetsi, zvichiteerana.
Iyo roughness (Ra) yenzvimbo yakavezwa yakatemerwa sebasa renguva yekupindura pa800 ° C. Kuoma kwemasamples mushure mekunyura kwe30, 60 uye 90 maminetsi aive 186±28 nm, 203±26 nm uye 212±30 nm, zvichiteerana. Iine etch kudzika kwe500, 800, kana 100 nm, iyo reshiyo (RD) yekukasharara kwenzvimbo yakavezwa kusvika pakadzika etch 0.372, 0.254, uye 0.212, zvichiteerana.
Iyo roughness yenzvimbo yakamisirwa haiwedzere zvakanyanya nekuwedzera etching kudzika. Zvakaonekwa kuti tembiricha inodiwa pakuita pakati pedhaimani neHM etchant inodarika 700°C.
Mhedzisiro yechidzidzo ichi inoratidza kuti FeCoB inogona kunyatsobvisa madhaimani nekukurumidza zvakanyanya kupfuura Fe kana Co chete.
Nguva yekutumira: Aug-31-2023