Mumakore achangopfuura, nekufambira mberi kweiyo integrated circuit (IC) tekinoroji, mashandisirwo ane hukama emasekete akabatanidzwa akagadzirwa nekukurumidza. Ultra yakakwirira kuchena aruminiyamu alloy sputtering chinangwa, sechinhu chinotsigira mukugadzira yakasanganiswa yedunhu simbi inobatana, yave nyaya inopisa mukutsvaga kwepamba munguva pfupi yapfuura. mupepeti weRSM achatiratidza maitiro ekuchena kwealuminum alloy sputtering target.
Kuti uenderere mberi nekuvandudza sputtering kunyatsoshanda kwemagnetron sputtering target uye kuve nechokwadi chemhando yemafirimu akaiswa, nhamba huru yezviedzo inoratidza kuti pane zvimwe zvinodikanwa pakuumbwa, microstructure uye kutaridzika kwezviyo zve-ultra-high purity aluminium alloy sputtering target.
Saizi yezviyo uye kutaridzika kwezviyo zvechinangwa zvine simba guru pakugadzirira uye zvimiro zveIC mafirimu. Mhedzisiro yacho inoratidza kuti deposition rate inoderera nekuwedzera kwehukuru hwezviyo; Pachinangwa chekupfira chine mutsara wakafanana, kupfira kwechinangwa nekukura kwezviyo zviduku kunokurumidza kudarika kwechinangwa chine hukuru hwezviyo; Iyo yakawanda yunifomu saizi yezviyo zvechinangwa, iyo yakawanda yunifomu kugovera ukobvu kwemafirimu akaiswa.
Pasi pechiridzwa chimwechete chekuputira uye maparamendi ekugadzirisa, mwero wekupopota weAl Cu alloy tarisiro inowedzera nekuwedzera kweatomu density, asi inowanzogadzikana mumhando. Mhedzisiro yehukuru hwezviyo pachiyero chekuputira imhaka yekuchinja kweatomu density nekuchinja kwehukuru hwezviyo; Iyo deposition rate inonyanya kukanganiswa neiyo yezviyo yeAl Cu alloy chinangwa. Pahwaro hwekuona chikamu che (200) ndege dzekristaro, kuwedzera kwechikamu che (111), (220) uye (311) ndege dzekristaro dzichawedzera deposition rate.
Saizi yezviyo uye kutaridzika kwezviyo zve-ultra-yakakwirira kuchena aluminium alloy zvinangwa zvinonyanya kugadziriswa uye kudzorwa nengot homogenization, kupisa kushanda uye recrystallization annealing. Nekugadzirwa kwewafer size kusvika 20.32cm (8in) uye 30.48cm (12in), saizi yechinangwa iri kuwedzera zvakare, izvo zvinoisa kumberi kwepamusoro-soro kuchena kwealuminum alloy sputtering targets. Kuti ive nechokwadi chemhando yefirimu uye goho, chinangwa chekugadzirisa maparamendi anofanirwa kunyatsodzorwa kuti iite iyo yakanangwa microstructure yunifomu uye kutaridzika kwezviyo kunofanirwa kuve kwakasimba (200) uye (220) ndege mameseji.
Nguva yekutumira: Jun-30-2022