Munguva ichangopfuura, shamwari dzakawanda dzakabvunza nezve maitiro e molybdenum sputtering zvinangwa. Muindasitiri yemagetsi, kuitira kuti uvandudze kufambisa zvakanaka uye kuve nechokwadi chemhando yemafirimu akaiswa, chii chinodiwa kune hunhu hwe molybdenum sputtering targets? Iye zvino nyanzvi dzehunyanzvi kubva kuRSM dzichatitsanangurira.
1. Kuchena
Kuchena kwepamusoro chinhu chakakosha chinodiwa che molybdenum sputtering chinangwa. Iyo yakakwirira kuchena kwe molybdenum chinangwa, zviri nani kuita kwefirimu rakasvibiswa. Kazhinji, kuchena kwe molybdenum sputtering chinangwa chinofanira kunge chiri 99.95% (chikamu chehuwandu, zvakafanana pazasi). Zvisinei, nekuenderera mberi kwekuvandudzwa kwehukuru hwegirazi substrate muLCD industry, kureba kwetambo kunoda kuwedzerwa uye mutsara unodiwa kuti uve wakaonda. Kuti uve nechokwadi chekufanana kwefirimu uye kunaka kwetambo, kuchena kwechinangwa chemolybdenum sputtering kunodawo kuwedzerwa maererano. Naizvozvo, maererano nehukuru hweiyo sputtered girazi substrate uye nharaunda yekushandisa, kuchena kwe molybdenum sputtering chinangwa chinodiwa kuve 99.99% - 99.999% kana kunyange yakakwirira.
Molybdenum sputtering target inoshandiswa se cathode sosi mukupfira. Kusachena kwakasimba uye okisijeni uye mhute yemvura mumapores ndiwo makuru ekusvibisa masosi emafirimu akaiswa. Uye zvakare, muindasitiri yemagetsi, nekuti alkali simbi ions (Na, K) zviri nyore kuita nharembozha muchikamu chekudzivirira, kuita kwechigadzirwa chekutanga kunoderedzwa; Zvinhu zvakaita seuranium (U) uye titanium (TI) zvichaburitswa α X-ray, zvichikonzera kuputsika kwakapfava kwemidziyo; Iron uye nickel ions inokonzeresa kuvuza uye kuwedzera kweokisijeni zvinhu. Naizvozvo, mugadziriro yegadziriro ye molybdenum sputtering target, izvi zvinhu zvetsvina zvinoda kunyatsodzorwa kuti zvideredze zvirimo muchinangwa.
2. Saizi yezviyo uye kugoverwa kwehukuru
Kazhinji, iyo molybdenum sputtering tarisiro ndeye polycrystalline chimiro, uye saizi yezviyo inogona kubva pamicron kusvika millimeter. Migumisiro yekuedza inoratidza kuti sputtering yezviyo zvakanangwa zvezviyo zvinokurumidza kudarika zvezviyo zvakakora; Kune chinangwa chine chidiki diki saizi mutsauko, ukobvu kugoverwa kwefirimu rakaiswa zvakare rakafanana.
3. Crystal orientation
Nekuda kwekuti maatomu anonangwa ari nyore kuti asapurwe achitevedza nzira yekurongedzerwa kwepedyo kwemaatomu mumativi ane hexagonal panguva yekupfapfaidza, kuitira kuti uwane chiyero chepamusoro chekupopotera, mwero wekupopotera unowanzo wedzera nekushandura chimiro chekristaro chechinangwa. Iyo yekristaro kutungamira kwechinangwa zvakare ine simba rakakura pakufanana kweukobvu hwefirimu rakapushwa. Naizvozvo, zvakakosha kwazvo kuwana imwe crystal yakanangwa chinangwa chechimiro cheiyo sputtering process yefirimu.
4. Densification
Mukati mekuita zvekuputira, kana chipfuro chekupopota chine density yabhomba, gasi riripo mumapores emukati mechinangwa rinobva raburitswa, zvichikonzera kupfichuka kwezvikamu zvakakura zvakanangwa kana zvimedu, kana zvinhu zvemufirimu zvinobhombwa. nemaerekitironi echipiri mushure mekuumbwa kwefirimu, zvichikonzera kupfachuka. Kuonekwa kwezvikamu izvi kunoderedza kunaka kwefirimu. Kuti uderedze ma pores muchinangwa chakasimba uye nekuvandudza kuita kwefirimu, iyo sputtering tarisiro inowanzodikanwa kuve nepamusoro density. Kune iyo molybdenum sputtering chinangwa, hukama hwayo hunofanira kunge huri kupfuura 98%.
5. Kusunga kwechinangwa nechasisi
Kazhinji, iyo molybdenum sputtering target inofanirwa kunge yakabatana neokisijeni yemhangura (kana aruminiyamu nezvimwe zvinhu) chassis isati yapfapfaidza, kuitira kuti kupisa kwemhepo kwechinangwa uye chassis kwakanaka panguva yekuputira. Mushure mekusunga, ultrasonic inspection inofanira kuitwa kuti ive nechokwadi chokuti nzvimbo isingabatanidzi yezviviri iri pasi pe2%, kuitira kuti isangane nezvinodiwa zve-high-power sputtering pasina kudonha.
Nguva yekutumira: Jul-19-2022