Nubuhe bwoko bwa Magnetron Sputtering Intego

Noneho abakoresha benshi kandi benshi bumva ubwoko bwintego kandiporogaramu zayo, ariko kugabana kwayo ntibishobora gusobanuka neza. Reka nonehoIngeneri ya RSM gusangira naweinduction ya magnetron yihuta.

Intego yo gusohora: intego yo gutwikisha ibyuma, intego yo gutwikisha amavuta, intego ya ceramic sputtering coating, intego ya boride ceramic sputtering, intego ya karbide ceramic sputtering, intego ya fluoride ceramic, intego ya nitride ceramic, intego ya selenide ceramic, intego, sulfide ceramic sputtering intego, telluride Intego ya ceramic, izindi ntego za ceramic, Chromium doped silicon oxyde ceramic (CR SiO), intego ya indium fosifide (INP), intego ya arsenide (pbas), intego ya indium arsenide (InAs).

Gukwirakwiza Magnetron muri rusange bigabanijwemo ubwoko bubiri: DC gusohora DC na RF. Ihame ryibikoresho bya DC byoroshe biroroshye, kandi igipimo cyacyo nacyo cyihuta mugihe gisohora ibyuma. RF sputtering ikoreshwa cyane. Usibye gusohora amakuru yimyitwarire, irashobora no gusohora amakuru atayobora. Intego yo gusohora irashobora kandi gukoreshwa mugukora ibishoboka kugirango hategurwe amakuru yimbitse nka oxyde, nitride na karbide. Niba inshuro ya RF yiyongereye, bizahinduka plasma ya microwave. Kugeza ubu, electron cyclotron resonance (ECR) microwave plasma sputtering ikoreshwa.