Ubwoko bwa Magnetron Intego

Hamwe no kwiyongera kwamasoko, byinshi kandi byinshi byintego za sputtering zihora zivugururwa. Bamwe baraziranye kandi bamwe ntibamenyereye abakiriya. Noneho, turashaka gusangira nawe ni ubuhe bwoko bwa magnetron sputtering intego.

Intego yo gusohora ifite ubwoko bukurikira: intego yo gutwikisha ibyuma, intego yo guteranya ibyuma, ceramic sputtering coating, intego ya boride ceramic sputtering, intego ya karbide ceramic sputtering, intego ya fluoride ceramic sputtering, intego ya nitide ceramic, intego ya selenide ceramic , intego ya siliside ceramic, intego ya sulfide ceramic, intego ya telluride ceramic sputtering, izindi ntego za ceramic, Chromium doped silicon oxyde ceramic (CR SiO), intego ya indium fosifide (INP), intego ya arsenide (pbas), intego ya indium arsenide (InAs).

Gukwirakwiza Magnetron muri rusange bigabanijwemo ubwoko bubiri: DC gusohora DC na RF. Ihame ryibikoresho bya DC byoroshe biroroshye, kandi igipimo cyacyo nacyo cyihuta mugihe gisohora ibyuma. RF sputtering ikoreshwa cyane. Usibye gusohora amakuru yimyitwarire, irashobora no gusohora amakuru atayobora. Muri icyo gihe, intego yo guswera nayo ikora ibintu bisohora kugirango itegure amakuru yimbitse nka oxyde, nitride na karbide. Niba inshuro ya RF yiyongereye, bizahinduka plasma ya microwave. Kugeza ubu, electron cyclotron resonance (ECR) microwave plasma sputtering ikoreshwa.