Abakoresha benshi bagomba kuba barumvise ibicuruzwa biva mu ntego, ariko ihame ryo gusunika intego rigomba kuba ritamenyerewe. Noneho, umwanditsi waIbikoresho bidasanzwe (RSM) asangiye magnetron gusohora amahame yo gusunika intego.
Umwanya wa magnetiki ya orthogonal n'umuriro w'amashanyarazi byongewe hagati ya electrode yagenewe (cathode) na anode, gaze ya inert isabwa (muri rusange gaze ya Ar) yuzuzwa mucyumba kinini cya vacuum, rukuruzi ihoraho ikora magnetiki ya 250 ~ 350 Gauss kuri ubuso bwibisobanuro byamakuru, hamwe na orthogonal electromagnetic yumurima ikorwa hamwe numuriro mwinshi w'amashanyarazi.
Ingaruka zumuriro wamashanyarazi, gazi ya Ar iion muri ion nziza na electron. Umuvuduko mubi mubi wongeyeho intego. Ingaruka yumurima wa magnetiki kuri electron ziva kumurongo wateganijwe hamwe na ionisation yo kuba gaze ikora yiyongera, bigakora plasma yuzuye cyane hafi ya cathode. Ingaruka zingufu za Lorentz, Ar ion yihuta kugera hejuru yintego hanyuma igatera hejuru yintego kumuvuduko mwinshi cyane, Atome zasutswe kurugero zikurikiza ihame ryo guhindura imbaraga hanyuma ziguruka ziva hejuru yintego zerekeza kuri substrate hamwe nimbaraga nyinshi za kinetic kubitsa firime.
Gukwirakwiza Magnetron muri rusange bigabanyijemo ubwoko bubiri: Gusohora imigezi no gusohora RF. Ihame ryibikoresho byo gutemba byimigezi biroroshye, kandi igipimo cyacyo nacyo cyihuta mugihe gisohora ibyuma. RF sputtering ikoreshwa cyane. Usibye gusohora ibikoresho byayobora, birashobora no gusohora ibikoresho bitayobora. Muri icyo gihe, ikora kandi ibintu byihuta kugirango itegure ibikoresho bya oxyde, nitride, karbide nibindi bikoresho. Niba RF inshuro yiyongereye, bizahinduka microwave plasma isohoka. Noneho, electron cyclotron resonance (ECR) microwave plasma sputtering ikoreshwa.
Igihe cyo kohereza: Gicurasi-31-2022