Porogaramu nihame ryo gusunika intego

Kubijyanye no gushyira mu bikorwa ihame rya tekinoroji ya tekinoroji, abakiriya bamwe babajije RSM, none kuri iki kibazo gihangayikishije cyane, impuguke mu bya tekinike zisangira ubumenyi bwihariye bujyanye.

　　Intego yo gusaba:

Kwishyuza ibice (nka argon ion) bitera ibisasu hejuru, bigatuma ibice byubuso, nka atome, molekile cyangwa bundle bishobora guhunga hejuru yikintu cyitwa "gusuka". Muri magnetron sputtering coating, ion nziza iterwa na argon ionisation ikoreshwa mugutera ibisasu bikomeye (intego), kandi atome zidafite aho zibogamiye zishyirwa kuri substrate (urupapuro rwakazi) kugirango ikore firime. Magnetron sputtering coating ifite ibintu bibiri biranga: "ubushyuhe buke" na "byihuse".

　　Ihame rya magnetron:

Umwanya wa magnetiki ya orthogonal n'umuriro w'amashanyarazi byongewe hagati ya pole igenewe (cathode) na anode, kandi gaze ya inert isabwa (ubusanzwe gaze ya Ar) yuzuzwa mucyumba kinini cya vacuum. Imashini ihoraho ikora magnetiki ya 250-350 ya Gauss hejuru yikintu cyagenewe, kandi ikora imashanyarazi ya orthogonal electromagnetic hamwe numuriro mwinshi w'amashanyarazi.

Mubikorwa byumurima wamashanyarazi, gazi ya Ar iioni muri ion nziza na electron, kandi hariho umuvuduko mwinshi mubi hejuru yintego, bityo electron ziva mumurongo wateganijwe zigira ingaruka kumurima wa rukuruzi hamwe na ionisation ishobora kuba ikora gaze yiyongera. Plasma yuzuye cyane ikorwa hafi ya cathode, kandi Ar ion yihuta kugera hejuru yintego ikorwa ningabo za Lorentz hanyuma igatera ibisasu hejuru yumuvuduko mwinshi, kuburyo atome zasakaye kurugero zihunga ziva hejuru yintego hamwe nuburebure imbaraga za kinetic no kuguruka kuri substrate kugirango ukore firime ukurikije ihame ryo guhindura imbaraga.

Gukwirakwiza Magnetron muri rusange bigabanijwemo ubwoko bubiri: gusohora DC na RF. Ihame ryibikoresho bya DC biroroshye, kandi igipimo kirihuta iyo gusohora ibyuma. Ikoreshwa rya RF sputtering ni nini cyane, usibye gusohora ibikoresho bitwara, ariko kandi no gusohora ibikoresho bitayobora, ariko kandi no gutegura imyuka ya okiside, nitide na karbide nibindi bikoresho bivanze. Niba inshuro ya RF yiyongereye, ihinduka microwave plasma isohoka. Kugeza ubu, electron cyclotron resonance (ECR) ubwoko bwa microwave plasma sputtering ikoreshwa.