Ihame ryo gutwikira vacuum

Ipfunyika rya Vacuum bivuga gushyushya no guhumeka isoko yumwuka muri vacuum cyangwa gusohora hamwe na ion yihuta cyane, hanyuma ukayishyira hejuru yubutaka kugirango ikore firime imwe cyangwa ibice byinshi. Ni irihe hame ryo gutwikira vacuum? Ibikurikira, umwanditsi wa RSM azabitumenyesha.

　　1. Igikoresho cyo guhumeka

Ipapurasiyo isaba ko intera iri hagati ya molekile ziva mumyuka cyangwa atome ziva mumyuka ihumeka hamwe na substrate igomba gutwikirwa bigomba kuba munsi yinzira yubusa yubusa ya molekile ya gaze isigaye mucyumba cyo gutwikamo, kugirango harebwe niba molekile ziva mumyuka ya guhumeka birashobora kugera hejuru ya substrate nta kugongana. Menya neza ko firime isukuye kandi ihamye, kandi guhumeka ntibizaba okiside.

　　2. Vacuum isuka

Mu cyuho, iyo ion yihuta igonganye nikomeye, kuruhande rumwe, kristu yangiritse, kurundi ruhande, bagongana na atome zigize kristu, amaherezo atom cyangwa molekile hejuru yikomeye. gusohoka hanze. Ibikoresho bisutswe bishyizwe kuri substrate kugirango bibe firime yoroheje, bita plaque vacuum. Hariho uburyo bwinshi bwo guswera, muribwo gusohora diode aribwo bwa mbere. Ukurikije intego zitandukanye za cathode, irashobora kugabanywa muburyo butaziguye (DC) hamwe numuyoboro mwinshi (RF). Umubare wa atome wasunitswe no kugira ingaruka ku buso bwerekanwe hamwe na ion bita igipimo cyo gusohora. Hamwe nigipimo kinini, umuvuduko wo gukora firime urihuta. Igipimo cyo gusohora kijyanye ningufu nubwoko bwa ion nubwoko bwibikoresho. Muri rusange, umuvuduko ukabije wiyongera hamwe no kwiyongera kwingufu za ion zabantu, kandi umuvuduko wibyuma byagaciro biri hejuru.