Intego yo gusunika ni ibikoresho bya elegitoronike ikora firime yoroheje muguhuza ibintu nka alloy cyangwa okiside yicyuma kuri substrate ya elegitoronike kurwego rwa atome. Muri byo, intego yo gusohora ya firime yirabura ikoreshwa mugukora firime kuri organic organic EL cyangwa kristu ya kirisiti ya kirisiti kugirango yirabura insinga kandi igabanye urumuri rugaragara (ruke) rwerekana insinga ya TFT. Intego ya sputter ifite ibyiza ningaruka zikurikira. Ugereranije nibicuruzwa byabanjirije iki, bifasha kuzamura urwego rwohejuru rwubwiza no gushushanya ubwisanzure bwerekana ibintu bitandukanye, no kugabanya urusaku rwatewe ninsinga zigaragaza urumuri rwibicuruzwa bifitanye isano na semiconductor.
Ibyiza n'ingaruka z'intego ya aluminium:
(1) Nyuma ya aluminiyumu imaze gushingwa, urumuri rugaragara rushobora kugabanuka
ugereranije nibicuruzwa byabanje, irashobora kugera kubitekerezo bike.
(2) Gusohora DC birashobora gukorwa nta gaze ya reaction
ugereranije nibicuruzwa byabanje, nibyiza kumenya firime homogeneity ya substrate nini.
(3) Filime imaze gushingwa, inzira yo guterana irashobora gukorerwa hamwe na wiring
hindura ibikoresho ukurikije inzira ihari yumukiriya, kandi irashobora guhuza hamwe ninsinga idahinduye inzira ihari. Byongeye kandi, isosiyete izatanga kandi inkunga ikurikije imiterere yabakiriya.
(4) Kurwanya ubushyuhe buhebuje, amazi no kurwanya alkali
usibye kurwanya amazi no kurwanya alkali, ifite kandi ubushyuhe bwinshi, bityo ibiranga firime ntibizahinduka mugikorwa cyo gutunganya insinga za TFT.
Igihe cyo kohereza: Kanama-10-2022