Iterambere ryiterambere ryumuringa mwinshi

Kugeza ubu, intego hafi ya zose zo mu rwego rwo hejuru cyane zifite uburebure bw'icyuma zisabwa n'umuringa usabwa n'inganda za IC zihariwe n'amasosiyete manini yo mu mahanga menshi yo mu mahanga. Intego zose za ultrapure z'umuringa zikenerwa n'inganda zo mu gihugu IC zigomba gutumizwa mu mahanga, ntabwo zihenze gusa, ariko kandi zigoye mu buryo bwo gutumiza mu mahanga Kubera iyo mpamvu, Ubushinwa bukeneye byihutirwa kunoza iterambere no kugenzura ubuziranenge bukabije (6N) bwo gusasa umuringa . Reka turebe ingingo zingenzi ningorane mugutezimbere ubuziranenge bwikirenga (6N) intego zumuringa.

1、Gutezimbere ibikoresho bya ultra bihanitse

Ikoranabuhanga ryo kweza ibyuma byera cyane Cu, Al na Ta mu Bushinwa biri kure cyane mubihugu byateye imbere mu nganda. Kugeza ubu, ibyinshi mu byuma bifite isuku nyinshi bishobora gutangwa ntibishobora kuba byujuje ubuziranenge bw’umuzunguruko uhuriweho kugira ngo ugere ku ntego ukurikije uburyo busanzwe bwo gusesengura ibintu mu nganda. Umubare wibisobanuro mu ntego ni mwinshi cyane cyangwa ugabanijwe neza. Ibice bikunze gukorwa kuri wafer mugihe cyo gusohora, bikavamo umuzunguruko mugufi cyangwa uruziga rufunguye rwuzuzanya, bigira ingaruka zikomeye kumikorere ya firime.

2、Gutezimbere tekinoroji yo gutegura umuringa

Iterambere rya tekinoroji yo gutegura umuringa yibanze cyane cyane kubintu bitatu: ingano yingano, kugenzura icyerekezo hamwe nuburinganire. Inganda za semiconductor zifite ibyangombwa byinshi byo gusohora intego no guhumeka ibikoresho fatizo. Ifite ibisabwa cyane kugirango igenzure ingano yubunini bwubutaka hamwe na kristu yerekana intego. Ingano yintete yintego igomba kugenzurwa kuri 100μ M hepfo rero, kugenzura ingano yubunini nuburyo bwo gusesengura no gutahura ni ngombwa cyane mugutezimbere ibyuma.

3、Gutezimbere isesengura kandiikizamini ikoranabuhanga

Isuku ryinshi yintego isobanura kugabanya umwanda. Mu bihe byashize, plasma ifatanyirijwe hamwe (ICP) hamwe na sprometrike ya atomike yakoreshwaga kugirango hamenyekane umwanda, ariko mu myaka yashize, isesengura ry’ubuziranenge bw’ibicuruzwa (GDMS) hamwe n’ubukangurambaga bukabije ryakoreshejwe buhoro buhoro nkibisanzwe buryo. Ikigereranyo cyo kurwanya ibisigisigi RRR ikoreshwa cyane cyane mukumenya ubuziranenge bwamashanyarazi. Ihame ryayo ryo kwiyemeza ni ugusuzuma ubwiza bwibyuma fatizo mugupima urugero rwo gukwirakwiza imyanda. Kuberako ari ugupima ubukana mubushyuhe bwicyumba nubushyuhe buke cyane, biroroshye gufata umubare. Mu myaka yashize, kugirango tumenye ishingiro ryibyuma, ubushakashatsi kuri ultra-high isuku irakora cyane. Muri iki kibazo, agaciro ka RRR ninzira nziza yo gusuzuma ubuziranenge.