Gukora polycrystalline ishusho ya diyama ukoresheje FeCoB ikomeye

Ubushakashatsi bushya mu kinyamakuru Diamond hamwe n’ibikoresho bifitanye isano byibanze ku gutobora diyama ya polycrystalline hamwe na FeCoB ikorwa kugirango ibe ishusho. Nkibisubizo byiterambere rishya ryikoranabuhanga, isura ya diyama irashobora kuboneka nta byangiritse kandi ifite inenge nke.
Ubushakashatsi: Gutoranya ahantu hatandukanye ya diyama muburyo bukomeye ukoresheje FeCoB hamwe nifoto ya fotolitografiya. Inguzanyo y'ishusho: Bjorn Wilezic / Shutterstock.com
Binyuze muburyo bukomeye bwo gukwirakwiza, firime ya FeCoB nanocrystalline (Fe: Co: B = 60: 20: 20, igipimo cya atome) irashobora kugera kuri lattice igamije no kurandura diyama muri microstructure.
Diyama ifite imiterere yihariye ya biohimiki n'amashusho, kimwe na elastique yo hejuru n'imbaraga. Kuramba kwayo gukabije nisoko yingenzi yiterambere mugutunganya ultra precision (tekinoroji yo guhindura diyama) n'inzira igana kumuvuduko ukabije murwego rwa GPa amagana.
Imiti idahwitse, kuramba kugaragara nibikorwa byibinyabuzima byongera igishushanyo mbonera cya sisitemu ikoresha iyo mikorere ikora. Diamond yihesheje izina mubijyanye na mechatronics, optique, sensor hamwe no gucunga amakuru.
Kugirango ushoboze gusaba, guhuza diyama nuburyo bwabo bitera ibibazo bigaragara. Gukora ion reaction (RIE), plasma ihujwe (ICP), hamwe na electron beam iterwa na etching ni ingero za sisitemu zisanzwe zikoresha tekiniki zo gutera (EBIE).
Imiterere ya diyama nayo yaremewe hakoreshejwe laser hamwe na ion beam yibanze (FIB). Intego yubu buhanga bwo guhimba nukwihutisha gusibanganya kimwe no kwemerera gupima ahantu hanini mubikorwa bikurikirana. Izi nzira zikoresha ibintu byamazi (plasma, gaze, nibisubizo byamazi), bigabanya geometrike igoye kugerwaho.
Iyi mirimo itangiza yiga gukuraho ibikoresho byumwuka wumuyaga kandi ikora diyama ya polycristaline hamwe na FeCoB (Fe: Co: B, 60:20:20 atome ku ijana) hejuru. Icyitonderwa cyibanze ku gushiraho moderi ya TM yo gutondeka neza metero yuburebure bwa diyama. Diyama iri munsi ihujwe na nanocrystalline FeCoB hakoreshejwe ubushyuhe kuri 700 kugeza 900 ° C muminota 30 kugeza 90.
Igice cyuzuye cya sample ya diyama yerekana microstructure ya polycrystalline. Ubukonje (Ra) muri buri gice cyihariye bwari 3.84 ± 0.47 nm, naho ubuso bwuzuye bwari 9,6 ± 1.2 nm. Ubukonje (mu ngano imwe ya diyama) bw'icyuma cya FeCoB cyatewe ni 3.39 ± 0.26 nm, n'uburebure bwacyo ni 100 ± 10 nm.
Nyuma yo gufatirwa kuri 800 ° C muminota 30, uburebure bwicyuma bwiyongereye kugera kuri 600 ± 100 nm, naho ubukana bwubuso (Ra) bwiyongereye bugera kuri 224 ± 22 nm. Mugihe cya annealing, atome ya karubone ikwirakwira murwego rwa FeCoB, bigatuma ubunini bwiyongera.
Ingero eshatu zifite FeCoB zifite uburebure bwa nm 100 zashyutswe ku bushyuhe bwa 700, 800, na 900 ° C. Iyo ubushyuhe buri munsi ya 700 ° C, ntaho bihurira cyane hagati ya diyama na FeCoB, kandi ibikoresho bike cyane bivanwaho nyuma yo kuvura hydrothermal. Gukuraho ibikoresho byongerewe ubushyuhe hejuru ya 800 ° C.
Iyo ubushyuhe bugeze kuri 900 ° C, igipimo cyo gutera cyiyongereyeho kabiri ugereranije n'ubushyuhe bwa 800 ° C. Nyamara, umwirondoro wakarere ka etched uratandukanye cyane nubwa etch yatewe (FeCoB).
Igishushanyo cyerekana amashusho yimiterere ya leta ihamye kugirango ikore igishushanyo: Guhitamo ahantu hatandukanye imiterere ya diyama ukoresheje fotolitografiya ya FeCoB. Inguzanyo y'ishusho: Van Z. na Shankar MR n'abandi, Diyama n'ibikoresho bifitanye isano.
Ingero za FeCoB 100 nm z'uburebure kuri diyama zatunganijwe kuri 800 ° C mu minota 30, 60, na 90.
Ubukonje (Ra) bwakarere kanditseho byagenwe nkigikorwa cyigihe cyo gusubiza kuri 800 ° C. Ubukomezi bw'icyitegererezo nyuma yo gufatisha iminota 30, 60 na 90 ni 186 ± 28 nm, 203 ± 26 nm na 212 ± 30 nm. Ubujyakuzimu bwa etch bwa 500, 800, cyangwa 100 nm, igipimo (RD) cyubugari bwakarere kanditseho ubujyakuzimu ni 0.372, 0.254, na 0.212.
Ubukonje bwakarere kegeranye ntabwo bwiyongera cyane hamwe no kongera ubujyakuzimu. Byagaragaye ko ubushyuhe bukenewe kugirango reaction iri hagati ya diyama na HM etchant irenga 700 ° C.
Ibyavuye mu bushakashatsi byerekana ko FeCoB ishobora gukuraho neza diyama ku kigero cyihuse kuruta Fe cyangwa Co wenyine.