Mu rwego rwo gushyigikira filime ishingiye kuri piezoelectric MEMS (pMEMS) sensor hamwe na radiyo yumurongo wa radiyo (RF) inganda zungurura, aluminium scandium alloy yakozwe na Rich Special Material Co., Ltd. ikoreshwa cyane mugushira mu bikorwa reaction ya firime ya scandium doped aluminium nitride .
Ibikoresho bya firime ntoya piezoelectric ikoreshwa cyane mubikoresho byimodoka, inganda nibikoresho bya elegitoroniki. Mubisabwa harimo pmt yerekana ibyuma byerekana urutoki nibikoresho byerekana ibimenyetso, mikoro ya MEMS, ibyuma bifata imiti ya resonator hamwe nubuvuzi. Mubyongeyeho, scandium doped aluminium nitride ya firime irakenewe cyane kugirango tumenye RF muyunguruzi ya 5G ya porogaramu. Muri icyo gihe, ingano ya aluminium scandium alloy iriyongera.
Ibyiza bya Al Sc Alloy
Imiti ihamye cyane ya homogeneity muri alloy
Filime ihamye cyane ya chimique homogeneity mubuzima bwa chip na alloy
Isuku> 99,9%, umwuka wa ogisijeni muke, ibintu bihumanya bihumanya
Igenzura cyane microstructure kugirango ugere kumikorere myiza ya sputtering
Vacuum cast, yuzuye yuzuye ivanze hamwe na adhesion nkeya, impinduka nke hamwe na granularitike
Umutungo udasanzwe wibikoresho Co, Ltd ushyigikira uburyo butandukanye bwo gushonga, kugenera intego hamwe na serivisi za R&D.
Igihe cyo kohereza: Ugushyingo-11-2022